Pulsed fiber laser "SumiLas" for micro-processing

Motoki Kakui, Shinobu Tamaoki, Yasuomi Kaneuchi, Hiroshi Kohda, Yuji Tanaka, Yasuhiro Okamoto, Yoshiyuki Uno, Brian Baird


3 被引用数 (Scopus)


In order to meet requirements in the next generation micro-processing, we have developed a 1.06μm pulsed fiber laser employing a MOPA (master oscillator power amplifier) configuration. This laser features broad pulse width flexibility ("100ps to 20ns), excellent beam quality (M2 ≦1.3), and a wide range of pulse repetition frequencies (50kHz to 1MHz). With these attributes of the laser, the optimum pulse width for P1 processing both (a)-Si (amorphous silicon) and CIS or CulnSe (copper indium diselenide) types of solar cells was studied. As a result, it was found that the pulse width of 10 to 20ns gives the best scribing quality on (a)-Si solar cells while the pulse width around 500ps leads to excellent results for CIS samples. The scanning speeds of 2500mm/s and 5000mm/s have been achieved for (a)-Si and CIS samples, respectively.this study, surface texturing of STAVAX, a through-hardening stainless steel for plastic molding, was also conducted. The surface roughness and water repellency on the STAVAX surface were controlled by adjusting the pulse width, number of scanning and assist gas condition.

ジャーナルSEI Technical Review
出版ステータスPublished - 4月 2011

ASJC Scopus subject areas

  • 電子工学および電気工学


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