Formation of TiO₂ film with lower electrical resistance by aerosol beam and fiber laser irradiation

Titanium dioxide (TiO₂) is a functional ceramic with unique photoconductive and photocatalytic properties. In our previous study, a TiO ₂ film was formed by aerosol beam irradiation. The films were darkened by femtosecond laser irradiation in air. Then electrical resistance of the darkened area on the film decreased. The heating process is also a useful method to vary the TiO₂ film property. Local heating can be performed by using a continuous wave (CW) fiber laser. In this study, the film was irradiated with a commercial CW fiber laser in vacuum. Laser irradiated area on the film was also darkened after CW fiber laser irradiation. The electrical resistance of the darkened area on the films was decreased as laser fluence was increased. Electrical resistance of the darkened area after CW fiber laser irradiation in vacuum was much smaller than that after femtosecond laser irradiation.