Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits

Masatsugu Yamashita; Toshihiko Kiwa; Masayoshi Tonouchi; Kodo Kawase

doi:10.1117/12.528833

Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits

Masatsugu Yamashita, Toshihiko Kiwa, Masayoshi Tonouchi, Kodo Kawase

研究成果 › 査読

1 被引用数 (Scopus)

抄録

We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.

本文言語	English
ページ（範囲）	104-111
ページ数	8
ジャーナル	Proceedings of SPIE - The International Society for Optical Engineering
巻	5354
DOI	https://doi.org/10.1117/12.528833
出版ステータス	Published - 7月 6 2004
外部発表	はい
イベント	Terahertz and Gigahertz Electronics and Photonics III - San Jose, CA 継続期間: 1月 25 2004 → 1月 26 2004

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
コンピュータサイエンスの応用
応用数学
電子工学および電気工学

文献へのアクセス

10.1117/12.528833

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引用スタイル

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abstract = "We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.",

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AU - Yamashita, Masatsugu

AU - Kiwa, Toshihiko

AU - Tonouchi, Masayoshi

AU - Kawase, Kodo

PY - 2004/7/6

Y1 - 2004/7/6

N2 - We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.

AB - We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.

KW - Electrical faults

KW - Femtosecond laser

KW - IC inspection

KW - THz emission

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