TY - GEN
T1 - Effects of back electromotive force in an absolute displacement sensor and improvement using current-feedback-type driver
AU - Kai, Takashi
AU - Akiyama, Masaya
AU - Nakamura, Yukinori
AU - Wakui, Shinji
PY - 2011/10/12
Y1 - 2011/10/12
N2 - An absolute displacement sensor, which can simultaneously detect acceleration, velocity, and displacement signals, has been proposed for vibration control of semiconductor manufacturing equipments. Based on state feedback, a control model of the sensor is previously designed in order to calculate the feedback gains using optimal regulator. However, characteristics in simulations have been different from experiments in low frequency region. This difference is due to modeling of a driver circuit. In this paper, a voltage-feedback-type driver is replaced by a current-feedback-type driver in actual circuits of the sensor. The latter driver can ignore the effect of back electromotive force from a forcer coil. After the driver and the force are remodeled, simulation parameters are identified. As a result, the simulations are corresponding to the experiments.
AB - An absolute displacement sensor, which can simultaneously detect acceleration, velocity, and displacement signals, has been proposed for vibration control of semiconductor manufacturing equipments. Based on state feedback, a control model of the sensor is previously designed in order to calculate the feedback gains using optimal regulator. However, characteristics in simulations have been different from experiments in low frequency region. This difference is due to modeling of a driver circuit. In this paper, a voltage-feedback-type driver is replaced by a current-feedback-type driver in actual circuits of the sensor. The latter driver can ignore the effect of back electromotive force from a forcer coil. After the driver and the force are remodeled, simulation parameters are identified. As a result, the simulations are corresponding to the experiments.
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M3 - Conference contribution
AN - SCOPUS:80053595912
SN - 9780955529375
T3 - 2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program
SP - 373
EP - 378
BT - 2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program
T2 - 2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011
Y2 - 11 August 2011 through 13 August 2011
ER -