A Role of Base Plate Jerk Feedback Scheme for Suppression of the Self Vibration in a Pneumatic Positioning Stage

Wali Mohebullah, Yukinori Nakamura, Shinji Wakui

研究成果 › 査読

本文言語	English
ページ（範囲）	252-259
ジャーナル	Journal of Advanced Mechanical Design, Systems and Manufacturing
巻	6
号	2
出版ステータス	Published - 2月 2012

引用スタイル

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title = "A Role of Base Plate Jerk Feedback Scheme for Suppression of the Self Vibration in a Pneumatic Positioning Stage",

author = "Wali Mohebullah and Yukinori Nakamura and Shinji Wakui",

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journal = "Journal of Advanced Mechanical Design, Systems and Manufacturing",

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AU - Wakui, Shinji

PY - 2012/2

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