Wire EDM Slicing of Monocrystalline Silicon Ingot

Akira Okada

Research output: Contribution to journal › Article

Original languageEnglish
Pages (from-to)172-175
Number of pages4
JournalProc. of the 15th American Society for Precision Engineering Annual Meeting
Publication statusPublished - 2000

Cite this

Wire EDM Slicing of Monocrystalline Silicon Ingot. / Okada, Akira.

In: Proc. of the 15th American Society for Precision Engineering Annual Meeting, 2000, p. 172-175.

Research output: Contribution to journal › Article

Okada, A 2000, 'Wire EDM Slicing of Monocrystalline Silicon Ingot', Proc. of the 15th American Society for Precision Engineering Annual Meeting, pp. 172-175.
Okada A. Wire EDM Slicing of Monocrystalline Silicon Ingot. Proc. of the 15th American Society for Precision Engineering Annual Meeting. 2000;172-175.
Okada, Akira. / Wire EDM Slicing of Monocrystalline Silicon Ingot. In: Proc. of the 15th American Society for Precision Engineering Annual Meeting. 2000 ; pp. 172-175.
@article{bc8dc9fc7b174539849bfe1ad390e4fd,
title = "Wire EDM Slicing of Monocrystalline Silicon Ingot",
author = "Akira Okada",
year = "2000",
language = "English",
pages = "172--175",
journal = "Proc. of the 15th American Society for Precision Engineering Annual Meeting",

}

TY - JOUR

T1 - Wire EDM Slicing of Monocrystalline Silicon Ingot

AU - Okada, Akira

PY - 2000

Y1 - 2000

M3 - Article

SP - 172

EP - 175

JO - Proc. of the 15th American Society for Precision Engineering Annual Meeting

JF - Proc. of the 15th American Society for Precision Engineering Annual Meeting

ER -