Vibration velocity limitation of transducer using hydrothermal PZT film

Yutaka Kobayashi, Minoru Kuribayashi Kurosawa, Takefumi Kanda, Toshiro Higuchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

High intensity vibration operation of a PZT thin film longitudinal vibrator fabricated with a hydrothermal method is described in this paper. Higher limitation of vibration velocity is very important for high output power actuators. For sensors, linearity of the response is an important factor. To investigate the performance of the PZT film material, we changed the deposition process of hydrothermal method and increased the thickness of the PZT film. As a result, the maximum vibration velocity of the longitudinal vibrator was 2.54 m/s. This value was almost 3 times larger than that of bulk PZT material. At such high intensity vibration level of over 2 m/s or driving voltage of 150 Vp-p, the frequency response curves were not linear.

Original languageEnglish
Title of host publicationProceedings of the IEEE Ultrasonics Symposium
Pages1047-1050
Number of pages4
Volume2
Publication statusPublished - 2001
Externally publishedYes
Event2001 Ultrasonics Symposium - Atlanta, GA, United States
Duration: Oct 6 2001Oct 10 2001

Other

Other2001 Ultrasonics Symposium
CountryUnited States
CityAtlanta, GA
Period10/6/0110/10/01

Fingerprint

Vibrators
Vibrations (mechanical)
Transducers
Frequency response
Actuators
Thin films
Sensors
Electric potential

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kobayashi, Y., Kuribayashi Kurosawa, M., Kanda, T., & Higuchi, T. (2001). Vibration velocity limitation of transducer using hydrothermal PZT film. In Proceedings of the IEEE Ultrasonics Symposium (Vol. 2, pp. 1047-1050)

Vibration velocity limitation of transducer using hydrothermal PZT film. / Kobayashi, Yutaka; Kuribayashi Kurosawa, Minoru; Kanda, Takefumi; Higuchi, Toshiro.

Proceedings of the IEEE Ultrasonics Symposium. Vol. 2 2001. p. 1047-1050.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kobayashi, Y, Kuribayashi Kurosawa, M, Kanda, T & Higuchi, T 2001, Vibration velocity limitation of transducer using hydrothermal PZT film. in Proceedings of the IEEE Ultrasonics Symposium. vol. 2, pp. 1047-1050, 2001 Ultrasonics Symposium, Atlanta, GA, United States, 10/6/01.
Kobayashi Y, Kuribayashi Kurosawa M, Kanda T, Higuchi T. Vibration velocity limitation of transducer using hydrothermal PZT film. In Proceedings of the IEEE Ultrasonics Symposium. Vol. 2. 2001. p. 1047-1050
Kobayashi, Yutaka ; Kuribayashi Kurosawa, Minoru ; Kanda, Takefumi ; Higuchi, Toshiro. / Vibration velocity limitation of transducer using hydrothermal PZT film. Proceedings of the IEEE Ultrasonics Symposium. Vol. 2 2001. pp. 1047-1050
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