TY - GEN
T1 - Verification of the damping effect of base plate jerk feedback scheme on the self-oscillation of a pneumatic positioning stage
AU - Wali, Mohebullah
AU - Nakamura, Yukinori
AU - Wakui, Shinji
PY - 2012/11/27
Y1 - 2012/11/27
N2 - In this study, a positioning stage which is actuated by four pneumatic cylinders and supported by four coil-type spring isolators is considered. In our past studies, the base plate jerk feedback (BPJFB) scheme was realized as a Master-Slave system that could synchronize the motion of stage (as a slave) with the motion of base plate (as a Master) against the vibration caused by the natural vibration of the base plate. However, the stage itself was slightly oscillatory due to the high gains set to the outer loop controller. This self-oscillation of the stage was misunderstood to be the natural vibration of the base plate. However, although the self-oscillation of stage was controlled by the BPJFB scheme, the related theory and some significant experimental results were not provided. Therefore, this paper focuses on the suppression of the self-oscillation of stage and the related theory. The experimental results obey the corresponding theory and demonstrate a newly recognized property of the BPJFB scheme, indicating the improvement of the positioning speed and stability.
AB - In this study, a positioning stage which is actuated by four pneumatic cylinders and supported by four coil-type spring isolators is considered. In our past studies, the base plate jerk feedback (BPJFB) scheme was realized as a Master-Slave system that could synchronize the motion of stage (as a slave) with the motion of base plate (as a Master) against the vibration caused by the natural vibration of the base plate. However, the stage itself was slightly oscillatory due to the high gains set to the outer loop controller. This self-oscillation of the stage was misunderstood to be the natural vibration of the base plate. However, although the self-oscillation of stage was controlled by the BPJFB scheme, the related theory and some significant experimental results were not provided. Therefore, this paper focuses on the suppression of the self-oscillation of stage and the related theory. The experimental results obey the corresponding theory and demonstrate a newly recognized property of the BPJFB scheme, indicating the improvement of the positioning speed and stability.
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M3 - Conference contribution
AN - SCOPUS:84869810924
SN - 9780955529382
T3 - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
SP - 235
EP - 240
BT - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
T2 - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
Y2 - 18 September 2012 through 21 September 2012
ER -