Two-axis-of-rotation drive system in electron-beam lithography apparatus for nanotechnology applications

K. Yamazaki, H. Namatsu

Research output: Contribution to journalConference articlepeer-review

22 Citations (Scopus)

Fingerprint Dive into the research topics of 'Two-axis-of-rotation drive system in electron-beam lithography apparatus for nanotechnology applications'. Together they form a unique fingerprint.

Chemical Compounds

Physics & Astronomy

Engineering & Materials Science