Tribological properties and oxidation resistance of (Cr,Al,Y)N and (Cr,Al,Si)N films synthesized by radio-frequency magnetron sputtering method

T. Miyake, Akira Kishimoto, H. Hasegawa

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Quaternary (Cr,Al)N-based nitride was synthesized from alloy targets by the radio-frequency magnetron sputtering method. The mole fractions of (Cr,Al,Y)N were 44mol% CrN, 52mol% AlN and 4mol% YN, while those of (Cr,Al,Si)N was 49mol% CrN, 47mol% AlN, and 4mol% SiN. As-deposited (Cr,Al,Y)N and (Cr,Al,Si)N films had a cubic NaCl structure, and their average surface roughness Ra was approximately 8.1nm and 6.3nm, respectively. From thermogravimetric analyses, the weight of (Cr,Al,Y)N was observed to increase from 0.03mg/cm2 to 0.30mg/cm2 in the temperature range of 600°C-1000°C. In contrast, a linear increase in the mass gain of (Cr,Al,Si)N from 0.05mg/cm2 to 0.18mg/cm2 was observed up to a temperature of 1000°C. Structural changes from single-phase cubic (NaCl) to wurtzite (AlN) and Cr2N occurred after thermal annealing in an ambient environment. During oxidation, metallic elements diffused toward the top surface, where the growth of oxides such as Cr2O3, Al2O3 and Y2O3 were confirmed. For the tribological test, the friction coefficient was below 0.6 under dry conditions at room temperature.

Original languageEnglish
JournalSurface and Coatings Technology
Volume205
Issue numberSUPPL. 1
DOIs
Publication statusPublished - Dec 25 2010

Fingerprint

oxidation resistance
Oxidation resistance
Magnetron sputtering
radio frequencies
magnetron sputtering
wurtzite
coefficient of friction
nitrides
surface roughness
Nitrides
Temperature
Oxides
oxidation
annealing
temperature
oxides
room temperature
Surface roughness
Annealing
Friction

Keywords

  • (Cr,Al,Si)N
  • (Cr,Al,Y)N
  • Microstructure
  • Oxidation resistance
  • Tribological properties

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

@article{a662d228e8c24c499e3699c2dc786f4e,
title = "Tribological properties and oxidation resistance of (Cr,Al,Y)N and (Cr,Al,Si)N films synthesized by radio-frequency magnetron sputtering method",
abstract = "Quaternary (Cr,Al)N-based nitride was synthesized from alloy targets by the radio-frequency magnetron sputtering method. The mole fractions of (Cr,Al,Y)N were 44mol{\%} CrN, 52mol{\%} AlN and 4mol{\%} YN, while those of (Cr,Al,Si)N was 49mol{\%} CrN, 47mol{\%} AlN, and 4mol{\%} SiN. As-deposited (Cr,Al,Y)N and (Cr,Al,Si)N films had a cubic NaCl structure, and their average surface roughness Ra was approximately 8.1nm and 6.3nm, respectively. From thermogravimetric analyses, the weight of (Cr,Al,Y)N was observed to increase from 0.03mg/cm2 to 0.30mg/cm2 in the temperature range of 600°C-1000°C. In contrast, a linear increase in the mass gain of (Cr,Al,Si)N from 0.05mg/cm2 to 0.18mg/cm2 was observed up to a temperature of 1000°C. Structural changes from single-phase cubic (NaCl) to wurtzite (AlN) and Cr2N occurred after thermal annealing in an ambient environment. During oxidation, metallic elements diffused toward the top surface, where the growth of oxides such as Cr2O3, Al2O3 and Y2O3 were confirmed. For the tribological test, the friction coefficient was below 0.6 under dry conditions at room temperature.",
keywords = "(Cr,Al,Si)N, (Cr,Al,Y)N, Microstructure, Oxidation resistance, Tribological properties",
author = "T. Miyake and Akira Kishimoto and H. Hasegawa",
year = "2010",
month = "12",
day = "25",
doi = "10.1016/j.surfcoat.2010.08.017",
language = "English",
volume = "205",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "SUPPL. 1",

}

TY - JOUR

T1 - Tribological properties and oxidation resistance of (Cr,Al,Y)N and (Cr,Al,Si)N films synthesized by radio-frequency magnetron sputtering method

AU - Miyake, T.

AU - Kishimoto, Akira

AU - Hasegawa, H.

PY - 2010/12/25

Y1 - 2010/12/25

N2 - Quaternary (Cr,Al)N-based nitride was synthesized from alloy targets by the radio-frequency magnetron sputtering method. The mole fractions of (Cr,Al,Y)N were 44mol% CrN, 52mol% AlN and 4mol% YN, while those of (Cr,Al,Si)N was 49mol% CrN, 47mol% AlN, and 4mol% SiN. As-deposited (Cr,Al,Y)N and (Cr,Al,Si)N films had a cubic NaCl structure, and their average surface roughness Ra was approximately 8.1nm and 6.3nm, respectively. From thermogravimetric analyses, the weight of (Cr,Al,Y)N was observed to increase from 0.03mg/cm2 to 0.30mg/cm2 in the temperature range of 600°C-1000°C. In contrast, a linear increase in the mass gain of (Cr,Al,Si)N from 0.05mg/cm2 to 0.18mg/cm2 was observed up to a temperature of 1000°C. Structural changes from single-phase cubic (NaCl) to wurtzite (AlN) and Cr2N occurred after thermal annealing in an ambient environment. During oxidation, metallic elements diffused toward the top surface, where the growth of oxides such as Cr2O3, Al2O3 and Y2O3 were confirmed. For the tribological test, the friction coefficient was below 0.6 under dry conditions at room temperature.

AB - Quaternary (Cr,Al)N-based nitride was synthesized from alloy targets by the radio-frequency magnetron sputtering method. The mole fractions of (Cr,Al,Y)N were 44mol% CrN, 52mol% AlN and 4mol% YN, while those of (Cr,Al,Si)N was 49mol% CrN, 47mol% AlN, and 4mol% SiN. As-deposited (Cr,Al,Y)N and (Cr,Al,Si)N films had a cubic NaCl structure, and their average surface roughness Ra was approximately 8.1nm and 6.3nm, respectively. From thermogravimetric analyses, the weight of (Cr,Al,Y)N was observed to increase from 0.03mg/cm2 to 0.30mg/cm2 in the temperature range of 600°C-1000°C. In contrast, a linear increase in the mass gain of (Cr,Al,Si)N from 0.05mg/cm2 to 0.18mg/cm2 was observed up to a temperature of 1000°C. Structural changes from single-phase cubic (NaCl) to wurtzite (AlN) and Cr2N occurred after thermal annealing in an ambient environment. During oxidation, metallic elements diffused toward the top surface, where the growth of oxides such as Cr2O3, Al2O3 and Y2O3 were confirmed. For the tribological test, the friction coefficient was below 0.6 under dry conditions at room temperature.

KW - (Cr,Al,Si)N

KW - (Cr,Al,Y)N

KW - Microstructure

KW - Oxidation resistance

KW - Tribological properties

UR - http://www.scopus.com/inward/record.url?scp=78649975670&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78649975670&partnerID=8YFLogxK

U2 - 10.1016/j.surfcoat.2010.08.017

DO - 10.1016/j.surfcoat.2010.08.017

M3 - Article

AN - SCOPUS:78649975670

VL - 205

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - SUPPL. 1

ER -