Touch probe sensor using longitudinal vibration of PZT thin film transducer

Takefumi Kanda, Takeshi Morita, Minoru K. Kurosawa, Toshiro Higuchi

Research output: Contribution to conferencePaper

Abstract

Touch probe sensors, a rod-shaped and a flat-type, have been fabricated. These sensors use longitudinal vibration of PZT thin film transducer. The later has been improved by miniaturizing and using flat configuration. The characteristic was evaluated by experiments.

Original languageEnglish
Pages481-484
Number of pages4
Publication statusPublished - 1998
Externally publishedYes
EventProceedings of the 1998 International Ultrasonics Symposium - Sendai, Miyagi, Jpn
Duration: Oct 5 1998Oct 8 1998

Other

OtherProceedings of the 1998 International Ultrasonics Symposium
CitySendai, Miyagi, Jpn
Period10/5/9810/8/98

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Kanda, T., Morita, T., Kurosawa, M. K., & Higuchi, T. (1998). Touch probe sensor using longitudinal vibration of PZT thin film transducer. 481-484. Paper presented at Proceedings of the 1998 International Ultrasonics Symposium, Sendai, Miyagi, Jpn, .