Touch probe sensor using longitudinal vibration of PZT thin film transducer

Takefumi Kanda, Takeshi Morita, Minoru K. Kurosawa, Toshiro Higuchi

Research output: Contribution to conferencePaper

Abstract

Touch probe sensors, a rod-shaped and a flat-type, have been fabricated. These sensors use longitudinal vibration of PZT thin film transducer. The later has been improved by miniaturizing and using flat configuration. The characteristic was evaluated by experiments.

Original languageEnglish
Pages481-484
Number of pages4
Publication statusPublished - 1998
Externally publishedYes
EventProceedings of the 1998 International Ultrasonics Symposium - Sendai, Miyagi, Jpn
Duration: Oct 5 1998Oct 8 1998

Other

OtherProceedings of the 1998 International Ultrasonics Symposium
CitySendai, Miyagi, Jpn
Period10/5/9810/8/98

Fingerprint

Transducers
Thin films
Sensors
Experiments

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kanda, T., Morita, T., Kurosawa, M. K., & Higuchi, T. (1998). Touch probe sensor using longitudinal vibration of PZT thin film transducer. 481-484. Paper presented at Proceedings of the 1998 International Ultrasonics Symposium, Sendai, Miyagi, Jpn, .

Touch probe sensor using longitudinal vibration of PZT thin film transducer. / Kanda, Takefumi; Morita, Takeshi; Kurosawa, Minoru K.; Higuchi, Toshiro.

1998. 481-484 Paper presented at Proceedings of the 1998 International Ultrasonics Symposium, Sendai, Miyagi, Jpn, .

Research output: Contribution to conferencePaper

Kanda, T, Morita, T, Kurosawa, MK & Higuchi, T 1998, 'Touch probe sensor using longitudinal vibration of PZT thin film transducer' Paper presented at Proceedings of the 1998 International Ultrasonics Symposium, Sendai, Miyagi, Jpn, 10/5/98 - 10/8/98, pp. 481-484.
Kanda T, Morita T, Kurosawa MK, Higuchi T. Touch probe sensor using longitudinal vibration of PZT thin film transducer. 1998. Paper presented at Proceedings of the 1998 International Ultrasonics Symposium, Sendai, Miyagi, Jpn, .
Kanda, Takefumi ; Morita, Takeshi ; Kurosawa, Minoru K. ; Higuchi, Toshiro. / Touch probe sensor using longitudinal vibration of PZT thin film transducer. Paper presented at Proceedings of the 1998 International Ultrasonics Symposium, Sendai, Miyagi, Jpn, .4 p.
@conference{b4c605b4400444619c636f6d157d99b4,
title = "Touch probe sensor using longitudinal vibration of PZT thin film transducer",
abstract = "Touch probe sensors, a rod-shaped and a flat-type, have been fabricated. These sensors use longitudinal vibration of PZT thin film transducer. The later has been improved by miniaturizing and using flat configuration. The characteristic was evaluated by experiments.",
author = "Takefumi Kanda and Takeshi Morita and Kurosawa, {Minoru K.} and Toshiro Higuchi",
year = "1998",
language = "English",
pages = "481--484",
note = "Proceedings of the 1998 International Ultrasonics Symposium ; Conference date: 05-10-1998 Through 08-10-1998",

}

TY - CONF

T1 - Touch probe sensor using longitudinal vibration of PZT thin film transducer

AU - Kanda, Takefumi

AU - Morita, Takeshi

AU - Kurosawa, Minoru K.

AU - Higuchi, Toshiro

PY - 1998

Y1 - 1998

N2 - Touch probe sensors, a rod-shaped and a flat-type, have been fabricated. These sensors use longitudinal vibration of PZT thin film transducer. The later has been improved by miniaturizing and using flat configuration. The characteristic was evaluated by experiments.

AB - Touch probe sensors, a rod-shaped and a flat-type, have been fabricated. These sensors use longitudinal vibration of PZT thin film transducer. The later has been improved by miniaturizing and using flat configuration. The characteristic was evaluated by experiments.

UR - http://www.scopus.com/inward/record.url?scp=0032277061&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032277061&partnerID=8YFLogxK

M3 - Paper

SP - 481

EP - 484

ER -