Three-dimensional metal microfabrication technique by using two-photon reduction

Nobuyuki Takeyasu, Takuo Tanaka, Satoshi Kawata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose micro-fabrication technique that enables us to obtain arbitrary 3D micro/nano metallic structures by scanning the laser beam spot in three dimensions. The spatial resolution and the electrical conductivity of the fabricated structures are discussed.

Original languageEnglish
Title of host publication2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
DOIs
Publication statusPublished - Dec 1 2007
Externally publishedYes
Event2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM - Seoul, Korea, Republic of
Duration: Aug 26 2007Aug 31 2007

Other

Other2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
CountryKorea, Republic of
CitySeoul
Period8/26/078/31/07

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Takeyasu, N., Tanaka, T., & Kawata, S. (2007). Three-dimensional metal microfabrication technique by using two-photon reduction. In 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM [4391626] https://doi.org/10.1109/CLEOPR.2007.4391626