Three-dimensional metal microfabrication technique by using two-photon reduction

Nobuyuki Takeyasu; Takuo Tanaka; Satoshi Kawata

doi:10.1109/CLEOPR.2007.4391626

Three-dimensional metal microfabrication technique by using two-photon reduction

Nobuyuki Takeyasu, Takuo Tanaka, Satoshi Kawata

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We propose micro-fabrication technique that enables us to obtain arbitrary 3D micro/nano metallic structures by scanning the laser beam spot in three dimensions. The spatial resolution and the electrical conductivity of the fabricated structures are discussed.

Original language	English
Title of host publication	2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
DOIs	https://doi.org/10.1109/CLEOPR.2007.4391626
Publication status	Published - Dec 1 2007
Externally published	Yes
Event	2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM - Seoul, Korea, Republic of Duration: Aug 26 2007 → Aug 31 2007

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other	2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
Country/Territory	Korea, Republic of
City	Seoul
Period	8/26/07 → 8/31/07

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2007.4391626

Cite this

Three-dimensional metal microfabrication technique by using two-photon reduction. / Takeyasu, Nobuyuki; Tanaka, Takuo; Kawata, Satoshi.

2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM. 2007. 4391626 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takeyasu, N, Tanaka, T & Kawata, S 2007, Three-dimensional metal microfabrication technique by using two-photon reduction. in 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM., 4391626, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM, Seoul, Korea, Republic of, 8/26/07. https://doi.org/10.1109/CLEOPR.2007.4391626

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abstract = "We propose micro-fabrication technique that enables us to obtain arbitrary 3D micro/nano metallic structures by scanning the laser beam spot in three dimensions. The spatial resolution and the electrical conductivity of the fabricated structures are discussed.",

author = "Nobuyuki Takeyasu and Takuo Tanaka and Satoshi Kawata",

year = "2007",

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doi = "10.1109/CLEOPR.2007.4391626",

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N2 - We propose micro-fabrication technique that enables us to obtain arbitrary 3D micro/nano metallic structures by scanning the laser beam spot in three dimensions. The spatial resolution and the electrical conductivity of the fabricated structures are discussed.

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T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

BT - 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM

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Y2 - 26 August 2007 through 31 August 2007

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Three-dimensional metal microfabrication technique by using two-photon reduction

Abstract

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ASJC Scopus subject areas

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