Three-dimensional metal microfabrication technique by using two-photon reduction

Nobuyuki Takeyasu, Takuo Tanaka, Satoshi Kawata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose micro-fabrication technique that enables us to obtain arbitrary 3D micro/nano metallic structures by scanning the laser beam spot in three dimensions. The spatial resolution and the electrical conductivity of the fabricated structures are discussed.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
PublisherOptical Society of America
ISBN (Print)1424411742, 9781424411740
Publication statusPublished - Jan 1 2007
Externally publishedYes
EventConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 - Seoul, Korea, Republic of
Duration: Aug 26 2007Aug 26 2007

Other

OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
CountryKorea, Republic of
CitySeoul
Period8/26/078/26/07

Fingerprint

Microfabrication
Laser beams
Photons
spatial resolution
laser beams
Scanning
fabrication
electrical resistivity
scanning
photons
Metals
metals
Electric Conductivity

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Takeyasu, N., Tanaka, T., & Kawata, S. (2007). Three-dimensional metal microfabrication technique by using two-photon reduction. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 Optical Society of America.

Three-dimensional metal microfabrication technique by using two-photon reduction. / Takeyasu, Nobuyuki; Tanaka, Takuo; Kawata, Satoshi.

Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takeyasu, N, Tanaka, T & Kawata, S 2007, Three-dimensional metal microfabrication technique by using two-photon reduction. in Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007, Seoul, Korea, Republic of, 8/26/07.
Takeyasu N, Tanaka T, Kawata S. Three-dimensional metal microfabrication technique by using two-photon reduction. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America. 2007
Takeyasu, Nobuyuki ; Tanaka, Takuo ; Kawata, Satoshi. / Three-dimensional metal microfabrication technique by using two-photon reduction. Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007.
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