Three-dimensional metal microfabrication technique by using two-photon reduction

Nobuyuki Takeyasu, Takuo Tanaka, Satoshi Kawata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose micro-fabrication technique that enables us to obtain arbitrary 3D micro/nano metallic structures by scanning the laser beam spot in three dimensions. The spatial resolution and the electrical conductivity of the fabricated structures are discussed.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
PublisherOptical Society of America
ISBN (Print)1424411742, 9781424411740
Publication statusPublished - Jan 1 2007
Externally publishedYes
EventConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 - Seoul, Korea, Republic of
Duration: Aug 26 2007Aug 26 2007

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
CountryKorea, Republic of
CitySeoul
Period8/26/078/26/07

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Takeyasu, N., Tanaka, T., & Kawata, S. (2007). Three-dimensional metal microfabrication technique by using two-photon reduction. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 (Optics InfoBase Conference Papers). Optical Society of America.