TY - GEN
T1 - Three-dimensional metal microfabrication technique by using two-photon reduction
AU - Takeyasu, Nobuyuki
AU - Tanaka, Takuo
AU - Kawata, Satoshi
PY - 2007/1/1
Y1 - 2007/1/1
N2 - We propose micro-fabrication technique that enables us to obtain arbitrary 3D micro/nano metallic structures by scanning the laser beam spot in three dimensions. The spatial resolution and the electrical conductivity of the fabricated structures are discussed.
AB - We propose micro-fabrication technique that enables us to obtain arbitrary 3D micro/nano metallic structures by scanning the laser beam spot in three dimensions. The spatial resolution and the electrical conductivity of the fabricated structures are discussed.
UR - http://www.scopus.com/inward/record.url?scp=84899072699&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84899072699&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84899072699
SN - 1424411742
SN - 9781424411740
T3 - Optics InfoBase Conference Papers
BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
PB - Optical Society of America
T2 - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
Y2 - 26 August 2007 through 26 August 2007
ER -