Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization

Florian Formanek, Nobuyuki Takeyasu, Takuo Tanaka, Kenta Chiyoda, Atsushi Ishikawa, Satoshi Kawata

Research output: Contribution to journalArticle

104 Citations (Scopus)

Abstract

An experimental protocol for the realization of three-dimensional periodic metallic micro/nanostructures over large areas is presented. Simultaneous fabrication of hundreds of three-dimensional complex polymer structures is achieved using a two-photon photopolymerization (TPP) technique combined with a microlens array. Metallization of the structures is performed through the deposition of thin and highly conductive films by electroless plating. A chemical modification of the photopolymerizable resin and the production of a hydrophobic coating on the glass surface supporting the structures are realized. This process prevents metal deposition on the substrate and restricts adhesion on polymer. Our technique can produce periodic and/or isolated metallic structures with arbitrary shape, created by more than 700 individual objects written in parallel.

Original languageEnglish
Pages (from-to)800-809
Number of pages10
JournalOptics Express
Volume14
Issue number2
DOIs
Publication statusPublished - Jan 23 2006
Externally publishedYes

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polymerization
fabrication
polymers
photons
plating
resins
adhesion
coatings
glass
metals

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization. / Formanek, Florian; Takeyasu, Nobuyuki; Tanaka, Takuo; Chiyoda, Kenta; Ishikawa, Atsushi; Kawata, Satoshi.

In: Optics Express, Vol. 14, No. 2, 23.01.2006, p. 800-809.

Research output: Contribution to journalArticle

Formanek, Florian ; Takeyasu, Nobuyuki ; Tanaka, Takuo ; Chiyoda, Kenta ; Ishikawa, Atsushi ; Kawata, Satoshi. / Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization. In: Optics Express. 2006 ; Vol. 14, No. 2. pp. 800-809.
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