Three-dimensional fabrication of metallic micro/nanostructures by two-photon polymerization for Metamaterials

Florian Formanek, Nobuyuki Takeyasu, Takuo Tanaka, Kenta Chiyoda, Atsushi Ishikawa, Satoshi Kawata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization (TPP) technique. Periodic three-dimensional (3D) polymer micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser amplified by a regenerative amplifier. The photopolymerizable resin and the glass substrate are chemically modified, and a pre-treatment with SnCl 2 is applied before realizing a uniform silver coating by electroless plating. This preparation enables a selective deposition of small silver particles only on the polymer surface all over the sample and to avoid metal deposition on the substrate. Electrical measurements show the structures to be highly conductive with typical resistivities ρ ∼ 10-7 Ωm, only a few times larger than the value for bulk silver. By taking advantage of the high accuracy and arbitrary shape modeling of TPP fabrication, we can realize complex periodic and/or metallic micro-nanostructures which were so far out of reach. Thus, a straightforward application could be the realization of metamaterials. The processing efficiency of our technique is demonstrated with the fabrication of several large samples, created by more than 700 objects written in parallel and metallized with silver.

Original languageEnglish
Title of host publicationPlasmonics
Subtitle of host publicationNanoimaging, Nanofabrication, and their Applications II
DOIs
Publication statusPublished - Nov 21 2006
EventPlasmonics: Nanoimaging, Nanofabrication, and their Applications II - San Diego, CA, United States
Duration: Aug 16 2006Aug 17 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6324
ISSN (Print)0277-786X

Other

OtherPlasmonics: Nanoimaging, Nanofabrication, and their Applications II
CountryUnited States
CitySan Diego, CA
Period8/16/068/17/06

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Keywords

  • 3D structure
  • Electroless plating
  • Metallic coating
  • Micro/nano fabrication
  • Two-photon photopolymerization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Formanek, F., Takeyasu, N., Tanaka, T., Chiyoda, K., Ishikawa, A., & Kawata, S. (2006). Three-dimensional fabrication of metallic micro/nanostructures by two-photon polymerization for Metamaterials. In Plasmonics: Nanoimaging, Nanofabrication, and their Applications II [63240T] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6324). https://doi.org/10.1117/12.681430