Abstract
Doping is an important technology for modern science. For example, to create a semiconductor device, a circuit is formed by controlling carriers by doping. It is important to search for appropriate conditions since the carrier emission from dopant differs depending on the doping conditions. The atomic arrangement around the dopant differs depending on the conditions. Therefore, it has been desired to observe the atomic arrangement around the dopant, but it has been difficult with conventional measurement methods. The atomic resolution holography such as photoelectron holography, X-ray fluorescence holography, neutron holography, which are methods that can measure the three-dimensional (3D) atomic arrangement of the dopant. Among them, photoelectron holography can measure the atomic structure of each dopant depending on the chemical state. We have built photoelectron holography apparatuses at BL25SU in SPring-8. We also developed a software platform 3D-AIR-IMAGE for data processing, simulation of photoelectron holograms, and 3D atomic image reconstruction.
| Original language | English |
|---|---|
| Title of host publication | 19th International Workshop on Junction Technology, IWJT 2019 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9784863487277 |
| DOIs | |
| Publication status | Published - Jun 1 2019 |
| Event | 19th International Workshop on Junction Technology, IWJT 2019 - Kyoto, Japan Duration: Jun 6 2019 → Jun 7 2019 |
Publication series
| Name | 19th International Workshop on Junction Technology, IWJT 2019 |
|---|
Conference
| Conference | 19th International Workshop on Junction Technology, IWJT 2019 |
|---|---|
| Country | Japan |
| City | Kyoto |
| Period | 6/6/19 → 6/7/19 |
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ASJC Scopus subject areas
- Process Chemistry and Technology
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
Cite this
Three-dimensional dopant imaging in semiconductor crystals using photoelectron holography with chemical state identification. / Matsushita, Tomohiro; Muro, Takayuki; Tsutsui, Kazuo; Yokoya, Takayoshi.
19th International Workshop on Junction Technology, IWJT 2019. Institute of Electrical and Electronics Engineers Inc., 2019. 8802898 (19th International Workshop on Junction Technology, IWJT 2019).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Three-dimensional dopant imaging in semiconductor crystals using photoelectron holography with chemical state identification
AU - Matsushita, Tomohiro
AU - Muro, Takayuki
AU - Tsutsui, Kazuo
AU - Yokoya, Takayoshi
PY - 2019/6/1
Y1 - 2019/6/1
N2 - Doping is an important technology for modern science. For example, to create a semiconductor device, a circuit is formed by controlling carriers by doping. It is important to search for appropriate conditions since the carrier emission from dopant differs depending on the doping conditions. The atomic arrangement around the dopant differs depending on the conditions. Therefore, it has been desired to observe the atomic arrangement around the dopant, but it has been difficult with conventional measurement methods. The atomic resolution holography such as photoelectron holography, X-ray fluorescence holography, neutron holography, which are methods that can measure the three-dimensional (3D) atomic arrangement of the dopant. Among them, photoelectron holography can measure the atomic structure of each dopant depending on the chemical state. We have built photoelectron holography apparatuses at BL25SU in SPring-8. We also developed a software platform 3D-AIR-IMAGE for data processing, simulation of photoelectron holograms, and 3D atomic image reconstruction.
AB - Doping is an important technology for modern science. For example, to create a semiconductor device, a circuit is formed by controlling carriers by doping. It is important to search for appropriate conditions since the carrier emission from dopant differs depending on the doping conditions. The atomic arrangement around the dopant differs depending on the conditions. Therefore, it has been desired to observe the atomic arrangement around the dopant, but it has been difficult with conventional measurement methods. The atomic resolution holography such as photoelectron holography, X-ray fluorescence holography, neutron holography, which are methods that can measure the three-dimensional (3D) atomic arrangement of the dopant. Among them, photoelectron holography can measure the atomic structure of each dopant depending on the chemical state. We have built photoelectron holography apparatuses at BL25SU in SPring-8. We also developed a software platform 3D-AIR-IMAGE for data processing, simulation of photoelectron holograms, and 3D atomic image reconstruction.
UR - http://www.scopus.com/inward/record.url?scp=85072082702&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85072082702&partnerID=8YFLogxK
U2 - 10.23919/IWJT.2019.8802898
DO - 10.23919/IWJT.2019.8802898
M3 - Conference contribution
T3 - 19th International Workshop on Junction Technology, IWJT 2019
BT - 19th International Workshop on Junction Technology, IWJT 2019
PB - Institute of Electrical and Electronics Engineers Inc.
ER -