TY - GEN
T1 - Three-dimensional dopant imaging in semiconductor crystals using photoelectron holography with chemical state identification
AU - Matsushita, Tomohiro
AU - Muro, Takayuki
AU - Tsutsui, Kazuo
AU - Yokoya, Takayoshi
N1 - Funding Information:
This work was supported by JSPS Grant-in-Aid for Scientific Research on Innovative Areas "3D Active-Site Science": Grant Number 26105007, 26105013, 26105014. The synchrotron radiation experiments were performed with the approval of JASRI (proposal Nos. 2014B1819, 2016A1261, 2015B1522).
Publisher Copyright:
© 2019 JSAP.
PY - 2019/6
Y1 - 2019/6
N2 - Doping is an important technology for modern science. For example, to create a semiconductor device, a circuit is formed by controlling carriers by doping. It is important to search for appropriate conditions since the carrier emission from dopant differs depending on the doping conditions. The atomic arrangement around the dopant differs depending on the conditions. Therefore, it has been desired to observe the atomic arrangement around the dopant, but it has been difficult with conventional measurement methods. The atomic resolution holography such as photoelectron holography, X-ray fluorescence holography, neutron holography, which are methods that can measure the three-dimensional (3D) atomic arrangement of the dopant. Among them, photoelectron holography can measure the atomic structure of each dopant depending on the chemical state. We have built photoelectron holography apparatuses at BL25SU in SPring-8. We also developed a software platform 3D-AIR-IMAGE for data processing, simulation of photoelectron holograms, and 3D atomic image reconstruction.
AB - Doping is an important technology for modern science. For example, to create a semiconductor device, a circuit is formed by controlling carriers by doping. It is important to search for appropriate conditions since the carrier emission from dopant differs depending on the doping conditions. The atomic arrangement around the dopant differs depending on the conditions. Therefore, it has been desired to observe the atomic arrangement around the dopant, but it has been difficult with conventional measurement methods. The atomic resolution holography such as photoelectron holography, X-ray fluorescence holography, neutron holography, which are methods that can measure the three-dimensional (3D) atomic arrangement of the dopant. Among them, photoelectron holography can measure the atomic structure of each dopant depending on the chemical state. We have built photoelectron holography apparatuses at BL25SU in SPring-8. We also developed a software platform 3D-AIR-IMAGE for data processing, simulation of photoelectron holograms, and 3D atomic image reconstruction.
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U2 - 10.23919/IWJT.2019.8802898
DO - 10.23919/IWJT.2019.8802898
M3 - Conference contribution
AN - SCOPUS:85072082702
T3 - 19th International Workshop on Junction Technology, IWJT 2019
BT - 19th International Workshop on Junction Technology, IWJT 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Workshop on Junction Technology, IWJT 2019
Y2 - 6 June 2019 through 7 June 2019
ER -