Thin plate longitudinal vibrator touch probe sensor using PZT thin film

Minoru Kuribayashi Kurosawa; Takefumi Kanda; Toshiro Higuchi; Takeshi Morita

Thin plate longitudinal vibrator touch probe sensor using PZT thin film

Minoru Kuribayashi Kurosawa, Takefumi Kanda, Toshiro Higuchi, Takeshi Morita

Research output: Contribution to journal › Conference article › peer-review

Abstract

Using PZT thin film, a vibro touch sensor was fabricated. The sensor is for measurement of material surface roughness and surface structure of micro devices such as VLSI up to sub nano meter order resolution without any damages to work piece. The sensor element has flat shape. Base material was titanium thin plate whose thickness was 100 μm. On both sides of the titanium, PZT film was deposited 10 μm. The sensor element had half wave length longitudinal vibration mode. The resonance frequency of the sensor was about 304 kHz. The sensitivity of the device is the tangential of the pickup voltage decrease. In the experimental, the tangential was 0.018 mV/nm. From the sensitivity and the noise level, the resolution of the sensor was 2.4 nm.

Original language	English
Pages (from-to)	703-706
Number of pages	4
Journal	Proceedings of the IEEE Ultrasonics Symposium
Volume	1
Publication status	Published - Dec 1 1999
Externally published	Yes
Event	1999 IEEE Ultrasonics Symposium - Caesars Tahoe, NV, USA Duration: Oct 17 1999 → Oct 20 1999

ASJC Scopus subject areas

Acoustics and Ultrasonics

Cite this

@article{a6931a289ebd4cf79587af9ae95dc8d0,

title = "Thin plate longitudinal vibrator touch probe sensor using PZT thin film",

abstract = "Using PZT thin film, a vibro touch sensor was fabricated. The sensor is for measurement of material surface roughness and surface structure of micro devices such as VLSI up to sub nano meter order resolution without any damages to work piece. The sensor element has flat shape. Base material was titanium thin plate whose thickness was 100 μm. On both sides of the titanium, PZT film was deposited 10 μm. The sensor element had half wave length longitudinal vibration mode. The resonance frequency of the sensor was about 304 kHz. The sensitivity of the device is the tangential of the pickup voltage decrease. In the experimental, the tangential was 0.018 mV/nm. From the sensitivity and the noise level, the resolution of the sensor was 2.4 nm.",

author = "Kurosawa, {Minoru Kuribayashi} and Takefumi Kanda and Toshiro Higuchi and Takeshi Morita",

year = "1999",

month = dec,

day = "1",

language = "English",

volume = "1",

pages = "703--706",

journal = "Proceedings of the IEEE Ultrasonics Symposium",

issn = "1051-0117",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "1999 IEEE Ultrasonics Symposium ; Conference date: 17-10-1999 Through 20-10-1999",

}

TY - JOUR

T1 - Thin plate longitudinal vibrator touch probe sensor using PZT thin film

AU - Kurosawa, Minoru Kuribayashi

AU - Kanda, Takefumi

AU - Higuchi, Toshiro

AU - Morita, Takeshi

PY - 1999/12/1

Y1 - 1999/12/1

N2 - Using PZT thin film, a vibro touch sensor was fabricated. The sensor is for measurement of material surface roughness and surface structure of micro devices such as VLSI up to sub nano meter order resolution without any damages to work piece. The sensor element has flat shape. Base material was titanium thin plate whose thickness was 100 μm. On both sides of the titanium, PZT film was deposited 10 μm. The sensor element had half wave length longitudinal vibration mode. The resonance frequency of the sensor was about 304 kHz. The sensitivity of the device is the tangential of the pickup voltage decrease. In the experimental, the tangential was 0.018 mV/nm. From the sensitivity and the noise level, the resolution of the sensor was 2.4 nm.

AB - Using PZT thin film, a vibro touch sensor was fabricated. The sensor is for measurement of material surface roughness and surface structure of micro devices such as VLSI up to sub nano meter order resolution without any damages to work piece. The sensor element has flat shape. Base material was titanium thin plate whose thickness was 100 μm. On both sides of the titanium, PZT film was deposited 10 μm. The sensor element had half wave length longitudinal vibration mode. The resonance frequency of the sensor was about 304 kHz. The sensitivity of the device is the tangential of the pickup voltage decrease. In the experimental, the tangential was 0.018 mV/nm. From the sensitivity and the noise level, the resolution of the sensor was 2.4 nm.

UR - http://www.scopus.com/inward/record.url?scp=0033296323&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033296323&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0033296323

SN - 1051-0117

VL - 1

SP - 703

EP - 706

JO - Proceedings of the IEEE Ultrasonics Symposium

JF - Proceedings of the IEEE Ultrasonics Symposium

T2 - 1999 IEEE Ultrasonics Symposium

Y2 - 17 October 1999 through 20 October 1999

ER -

Thin plate longitudinal vibrator touch probe sensor using PZT thin film

Abstract

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this