Thin plate longitudinal vibrator touch probe sensor using PZT thin film

Minoru Kuribayashi Kurosawa, Takefumi Kanda, Toshiro Higuchi, Takeshi Morita

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Using PZT thin film, a vibro touch sensor was fabricated. The sensor is for measurement of material surface roughness and surface structure of micro devices such as VLSI up to sub nano meter order resolution without any damages to work piece. The sensor element has flat shape. Base material was titanium thin plate whose thickness was 100 μm. On both sides of the titanium, PZT film was deposited 10 μm. The sensor element had half wave length longitudinal vibration mode. The resonance frequency of the sensor was about 304 kHz. The sensitivity of the device is the tangential of the pickup voltage decrease. In the experimental, the tangential was 0.018 mV/nm. From the sensitivity and the noise level, the resolution of the sensor was 2.4 nm.

Original languageEnglish
Title of host publicationProceedings of the IEEE Ultrasonics Symposium
PublisherIEEE
Pages703-706
Number of pages4
Volume1
Publication statusPublished - 1999
Externally publishedYes
Event1999 IEEE Ultrasonics Symposium - Caesars Tahoe, NV, USA
Duration: Oct 17 1999Oct 20 1999

Other

Other1999 IEEE Ultrasonics Symposium
CityCaesars Tahoe, NV, USA
Period10/17/9910/20/99

Fingerprint

Vibrators
Thin films
Sensors
Titanium
Pickups
Surface structure
Vibrations (mechanical)
Surface roughness
Wavelength
Electric potential

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kurosawa, M. K., Kanda, T., Higuchi, T., & Morita, T. (1999). Thin plate longitudinal vibrator touch probe sensor using PZT thin film. In Proceedings of the IEEE Ultrasonics Symposium (Vol. 1, pp. 703-706). IEEE.

Thin plate longitudinal vibrator touch probe sensor using PZT thin film. / Kurosawa, Minoru Kuribayashi; Kanda, Takefumi; Higuchi, Toshiro; Morita, Takeshi.

Proceedings of the IEEE Ultrasonics Symposium. Vol. 1 IEEE, 1999. p. 703-706.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kurosawa, MK, Kanda, T, Higuchi, T & Morita, T 1999, Thin plate longitudinal vibrator touch probe sensor using PZT thin film. in Proceedings of the IEEE Ultrasonics Symposium. vol. 1, IEEE, pp. 703-706, 1999 IEEE Ultrasonics Symposium, Caesars Tahoe, NV, USA, 10/17/99.
Kurosawa MK, Kanda T, Higuchi T, Morita T. Thin plate longitudinal vibrator touch probe sensor using PZT thin film. In Proceedings of the IEEE Ultrasonics Symposium. Vol. 1. IEEE. 1999. p. 703-706
Kurosawa, Minoru Kuribayashi ; Kanda, Takefumi ; Higuchi, Toshiro ; Morita, Takeshi. / Thin plate longitudinal vibrator touch probe sensor using PZT thin film. Proceedings of the IEEE Ultrasonics Symposium. Vol. 1 IEEE, 1999. pp. 703-706
@inproceedings{a6931a289ebd4cf79587af9ae95dc8d0,
title = "Thin plate longitudinal vibrator touch probe sensor using PZT thin film",
abstract = "Using PZT thin film, a vibro touch sensor was fabricated. The sensor is for measurement of material surface roughness and surface structure of micro devices such as VLSI up to sub nano meter order resolution without any damages to work piece. The sensor element has flat shape. Base material was titanium thin plate whose thickness was 100 μm. On both sides of the titanium, PZT film was deposited 10 μm. The sensor element had half wave length longitudinal vibration mode. The resonance frequency of the sensor was about 304 kHz. The sensitivity of the device is the tangential of the pickup voltage decrease. In the experimental, the tangential was 0.018 mV/nm. From the sensitivity and the noise level, the resolution of the sensor was 2.4 nm.",
author = "Kurosawa, {Minoru Kuribayashi} and Takefumi Kanda and Toshiro Higuchi and Takeshi Morita",
year = "1999",
language = "English",
volume = "1",
pages = "703--706",
booktitle = "Proceedings of the IEEE Ultrasonics Symposium",
publisher = "IEEE",

}

TY - GEN

T1 - Thin plate longitudinal vibrator touch probe sensor using PZT thin film

AU - Kurosawa, Minoru Kuribayashi

AU - Kanda, Takefumi

AU - Higuchi, Toshiro

AU - Morita, Takeshi

PY - 1999

Y1 - 1999

N2 - Using PZT thin film, a vibro touch sensor was fabricated. The sensor is for measurement of material surface roughness and surface structure of micro devices such as VLSI up to sub nano meter order resolution without any damages to work piece. The sensor element has flat shape. Base material was titanium thin plate whose thickness was 100 μm. On both sides of the titanium, PZT film was deposited 10 μm. The sensor element had half wave length longitudinal vibration mode. The resonance frequency of the sensor was about 304 kHz. The sensitivity of the device is the tangential of the pickup voltage decrease. In the experimental, the tangential was 0.018 mV/nm. From the sensitivity and the noise level, the resolution of the sensor was 2.4 nm.

AB - Using PZT thin film, a vibro touch sensor was fabricated. The sensor is for measurement of material surface roughness and surface structure of micro devices such as VLSI up to sub nano meter order resolution without any damages to work piece. The sensor element has flat shape. Base material was titanium thin plate whose thickness was 100 μm. On both sides of the titanium, PZT film was deposited 10 μm. The sensor element had half wave length longitudinal vibration mode. The resonance frequency of the sensor was about 304 kHz. The sensitivity of the device is the tangential of the pickup voltage decrease. In the experimental, the tangential was 0.018 mV/nm. From the sensitivity and the noise level, the resolution of the sensor was 2.4 nm.

UR - http://www.scopus.com/inward/record.url?scp=0033296323&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033296323&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0033296323

VL - 1

SP - 703

EP - 706

BT - Proceedings of the IEEE Ultrasonics Symposium

PB - IEEE

ER -