Theoretical modeling of laser-produced plasmas for development of extreme UV radiation source for lithography

K. Nishihara, T. Nishikawa, A. Sasaki, T. Kawamura, A. Sunahara, H. Furukawa, M. Murakami, H. Nishimura, Y. Shimada, M. Nakai, S. Fujioka, K. Shigemori, S. Uchida, K. Fujima, R. More, F. Koike, T. Kagawa, V. Zhakhovskii, K. Hashimoto, M. YamauraR. Matsui, T. Hibino, T. Okuno, Y. Tao, F. L. Sohnatzadeh, K. Nagai, T. Norimatsu, H. Tanuma, N. Miyanaga, Y. Izawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

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Engineering & Materials Science