Theoretical modeling of laser-produced plasmas for development of extreme UV radiation source for lithography

K. Nishihara, T. Nishikawa, A. Sasaki, T. Kawamura, A. Sunahara, H. Furukawa, M. Murakami, H. Nishimura, Y. Shimada, M. Nakai, S. Fujioka, K. Shigemori, S. Uchida, K. Fujima, R. More, F. Koike, T. Kagawa, V. Zhakhovskii, K. Hashimoto, M. YamauraR. Matsui, T. Hibino, T. Okuno, Y. Tao, F. L. Sohnatzadeh, K. Nagai, T. Norimatsu, H. Tanuma, N. Miyanaga, Y. Izawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A design window of laser and plasma parameters required for an extreme ultraviolet (EUV) radiation source for practical application for the next generation of lithography has been introduced. We present a simple analytical model of conversion efficiency from laser energy to radiation energy with a wavelength of 13.5 nm with 2 % bandwidth, by considering power balance of laser produced high-z plasma. We also investigate dependence of the EUV emission from tin and tin-oxide plasmas on laser intensity and wavelength in spherical geometry using the GEKKO XII laser system. It is found that the conversion efficiency into a 2% bandwidth about 13.5 nm has a maximum of a few percent near the laser intensity 10 11 W/cm 2. The efficiency is about the same for 1.053 μm and 0.527 μm laser wavelengths. A scaling law of the conversion efficiency on the laser intensity obtained agrees fairly well with the experimental results. The model also explains many features of the spectrum observed in the experiments.

Original languageEnglish
Title of host publicationInertial Fusion Sciences and Applications 2003
EditorsB.A. Hammel, D.D. Meyerhofer, J. Meyer-ter-Vehn
Pages1069-1073
Number of pages5
Publication statusPublished - 2004
EventThird International Conference on Inertial Fusion Sciences and Applications, IFSA 2003 - Monterey, CA, United States
Duration: Sep 7 2003Sep 12 2003

Publication series

NameInertial Fusion Sciences and Applications 2003

Other

OtherThird International Conference on Inertial Fusion Sciences and Applications, IFSA 2003
CountryUnited States
CityMonterey, CA
Period9/7/039/12/03

ASJC Scopus subject areas

  • Engineering(all)

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