Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultraviolet light sources based on terbium plasmas

Akira Sasaki, Katsunobu Nishihara, Atsushi Sunahara, Hiroyuki Furukawa, Takeshi Nishikawa, Fumihiro Koike

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

The emission spectrum and conversion efficiency of laser-produced terbium plasmas are theoretically investigated on the basis of computational atomic data. The theoretically calculated spectrum reproduces the main peak of observed spectrum at λ=6.5 nm, which originates from 4d-4f transitions of near palladiumlike ions (Tb19+). A simple model of the isothermal expansion of terbium plasma suggests that efficient emission can be achieved by pumping the plasma with a laser pulse at an intensity of approximately one order of magnitude greater than that used with tin sources at λ=13.5 nm.

Original languageEnglish
Article number231501
JournalApplied Physics Letters
Volume97
Issue number23
DOIs
Publication statusPublished - Dec 6 2010

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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