Theoretical and experimental databases for high average power EUV light source by laser produced plasma

H. Nishimura; K. Nishihara; S. Fujioka; T. Aota; T. Ando; M. Shimomura; K. Sakaguchi; Y. Simada; M. Yamaura; K. Nagai; T. Norimatsu; A. Sunahara; M. Murakami; A. Sasaki; H. Tanuma; F. Koike; K. Fuijma; C. Suzuki; S. Morita; T. Kato; T. Kagawa; T. Nishikawa; N. Miyanaga; Y. Izawa; K. Mima

doi:10.1063/1.2768859

Theoretical and experimental databases for high average power EUV light source by laser produced plasma

H. Nishimura, K. Nishihara, S. Fujioka, T. Aota, T. Ando, M. Shimomura, K. Sakaguchi, Y. Simada, M. Yamaura, K. Nagai, T. Norimatsu, A. Sunahara, M. Murakami, A. Sasaki, H. Tanuma, F. Koike, K. Fuijma, C. Suzuki, S. Morita, T. KatoT. Kagawa, T. Nishikawa, N. Miyanaga, Y. Izawa, K. Mima

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Extreme ultraviolet (EUV) radiation from laser-produced plasma has been thoroughly studied for application in mass-production of the next generation semiconductor devices. Comprehensive experimental databases are provided for a wide range of parameters of lasers and targets. The atomic models are benchmarked with spectroscopic measurements not only for laser-produced plasma (LPP) but also for EUV emissions from magnetic-confinement plasmas or the charge exchange for uniquely ionized ions colliding with rare-gas targets. These experimental data are utilized in the industry as well as used to benchmark the radiation hydrodynamic code, including equation-of-state solvers and advanced atomic kinetic models, dedicated for EUV plasma predictions. Present status of the LPP EUV source studies is presented.

Original language	English
Title of host publication	Atomic Processes in Plasmas - 15th International Conference on Atomic Processes in Plasmas, APiP
Pages	270-280
Number of pages	11
DOIs	https://doi.org/10.1063/1.2768859
Publication status	Published - 2007
Event	15th International Conference on Atomic Processes in Plasmas, APiP - Gaithersburg, MD, United States Duration: Mar 19 2007 → Mar 22 2007

Publication series

Name	AIP Conference Proceedings
Volume	926
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Other

Other	15th International Conference on Atomic Processes in Plasmas, APiP
Country	United States
City	Gaithersburg, MD
Period	3/19/07 → 3/22/07

Keywords

Charge-exchange spectroscopy
Extreme Ultraviolet (EUV)
Laser produced tin plasma
Tin opacity

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.2768859

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Nishimura, H., Nishihara, K., Fujioka, S., Aota, T., Ando, T., Shimomura, M., Sakaguchi, K., Simada, Y., Yamaura, M., Nagai, K., Norimatsu, T., Sunahara, A., Murakami, M., Sasaki, A., Tanuma, H., Koike, F., Fuijma, K., Suzuki, C., Morita, S., ... Mima, K. (2007). Theoretical and experimental databases for high average power EUV light source by laser produced plasma. In Atomic Processes in Plasmas - 15th International Conference on Atomic Processes in Plasmas, APiP (pp. 270-280). (AIP Conference Proceedings; Vol. 926). https://doi.org/10.1063/1.2768859

Theoretical and experimental databases for high average power EUV light source by laser produced plasma. / Nishimura, H.; Nishihara, K.; Fujioka, S.; Aota, T.; Ando, T.; Shimomura, M.; Sakaguchi, K.; Simada, Y.; Yamaura, M.; Nagai, K.; Norimatsu, T.; Sunahara, A.; Murakami, M.; Sasaki, A.; Tanuma, H.; Koike, F.; Fuijma, K.; Suzuki, C.; Morita, S.; Kato, T.; Kagawa, T.; Nishikawa, T.; Miyanaga, N.; Izawa, Y.; Mima, K.

Atomic Processes in Plasmas - 15th International Conference on Atomic Processes in Plasmas, APiP. 2007. p. 270-280 (AIP Conference Proceedings; Vol. 926).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nishimura, H, Nishihara, K, Fujioka, S, Aota, T, Ando, T, Shimomura, M, Sakaguchi, K, Simada, Y, Yamaura, M, Nagai, K, Norimatsu, T, Sunahara, A, Murakami, M, Sasaki, A, Tanuma, H, Koike, F, Fuijma, K, Suzuki, C, Morita, S, Kato, T, Kagawa, T, Nishikawa, T, Miyanaga, N, Izawa, Y & Mima, K 2007, Theoretical and experimental databases for high average power EUV light source by laser produced plasma. in Atomic Processes in Plasmas - 15th International Conference on Atomic Processes in Plasmas, APiP. AIP Conference Proceedings, vol. 926, pp. 270-280, 15th International Conference on Atomic Processes in Plasmas, APiP, Gaithersburg, MD, United States, 3/19/07. https://doi.org/10.1063/1.2768859

Nishimura, H. ; Nishihara, K. ; Fujioka, S. ; Aota, T. ; Ando, T. ; Shimomura, M. ; Sakaguchi, K. ; Simada, Y. ; Yamaura, M. ; Nagai, K. ; Norimatsu, T. ; Sunahara, A. ; Murakami, M. ; Sasaki, A. ; Tanuma, H. ; Koike, F. ; Fuijma, K. ; Suzuki, C. ; Morita, S. ; Kato, T. ; Kagawa, T. ; Nishikawa, T. ; Miyanaga, N. ; Izawa, Y. ; Mima, K. / Theoretical and experimental databases for high average power EUV light source by laser produced plasma. Atomic Processes in Plasmas - 15th International Conference on Atomic Processes in Plasmas, APiP. 2007. pp. 270-280 (AIP Conference Proceedings).

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author = "H. Nishimura and K. Nishihara and S. Fujioka and T. Aota and T. Ando and M. Shimomura and K. Sakaguchi and Y. Simada and M. Yamaura and K. Nagai and T. Norimatsu and A. Sunahara and M. Murakami and A. Sasaki and H. Tanuma and F. Koike and K. Fuijma and C. Suzuki and S. Morita and T. Kato and T. Kagawa and T. Nishikawa and N. Miyanaga and Y. Izawa and K. Mima",

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AU - Ando, T.

AU - Shimomura, M.

AU - Sakaguchi, K.

AU - Simada, Y.

AU - Yamaura, M.

AU - Nagai, K.

AU - Norimatsu, T.

AU - Sunahara, A.

AU - Murakami, M.

AU - Sasaki, A.

AU - Tanuma, H.

AU - Koike, F.

AU - Fuijma, K.

AU - Suzuki, C.

AU - Morita, S.

AU - Kato, T.

AU - Kagawa, T.

AU - Nishikawa, T.

AU - Miyanaga, N.

AU - Izawa, Y.

AU - Mima, K.

PY - 2007

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KW - Extreme Ultraviolet (EUV)

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KW - Tin opacity

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