Theoretical and experimental databases for high average power EUV light source by laser produced plasma

H. Nishimura, K. Nishihara, S. Fujioka, T. Aota, T. Ando, M. Shimomura, K. Sakaguchi, Y. Simada, M. Yamaura, K. Nagai, T. Norimatsu, A. Sunahara, M. Murakami, A. Sasaki, H. Tanuma, F. Koike, K. Fuijma, C. Suzuki, S. Morita, T. KatoT. Kagawa, T. Nishikawa, N. Miyanaga, Y. Izawa, K. Mima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Extreme ultraviolet (EUV) radiation from laser-produced plasma has been thoroughly studied for application in mass-production of the next generation semiconductor devices. Comprehensive experimental databases are provided for a wide range of parameters of lasers and targets. The atomic models are benchmarked with spectroscopic measurements not only for laser-produced plasma (LPP) but also for EUV emissions from magnetic-confinement plasmas or the charge exchange for uniquely ionized ions colliding with rare-gas targets. These experimental data are utilized in the industry as well as used to benchmark the radiation hydrodynamic code, including equation-of-state solvers and advanced atomic kinetic models, dedicated for EUV plasma predictions. Present status of the LPP EUV source studies is presented.

Original languageEnglish
Title of host publicationAtomic Processes in Plasmas - 15th International Conference on Atomic Processes in Plasmas, APiP
Pages270-280
Number of pages11
DOIs
Publication statusPublished - 2007
Event15th International Conference on Atomic Processes in Plasmas, APiP - Gaithersburg, MD, United States
Duration: Mar 19 2007Mar 22 2007

Publication series

NameAIP Conference Proceedings
Volume926
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other15th International Conference on Atomic Processes in Plasmas, APiP
CountryUnited States
CityGaithersburg, MD
Period3/19/073/22/07

Keywords

  • Charge-exchange spectroscopy
  • Extreme Ultraviolet (EUV)
  • Laser produced tin plasma
  • Tin opacity

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Nishimura, H., Nishihara, K., Fujioka, S., Aota, T., Ando, T., Shimomura, M., Sakaguchi, K., Simada, Y., Yamaura, M., Nagai, K., Norimatsu, T., Sunahara, A., Murakami, M., Sasaki, A., Tanuma, H., Koike, F., Fuijma, K., Suzuki, C., Morita, S., ... Mima, K. (2007). Theoretical and experimental databases for high average power EUV light source by laser produced plasma. In Atomic Processes in Plasmas - 15th International Conference on Atomic Processes in Plasmas, APiP (pp. 270-280). (AIP Conference Proceedings; Vol. 926). https://doi.org/10.1063/1.2768859