The effect of an electrostatic force on imaging a surface topography by noncontact atomic force microscope

Tadashi Shiota, Keiji Nakayama

Research output: Contribution to journalLetter

13 Citations (Scopus)

Abstract

Noncontact atomic force microscope (NC-AFM) with and without scanning Kelvin probe force microscope (SKPM) has been studied to clarify the effect of an electrostatic force between a cantilever tip and a specimen on the NC-AFM imaging. The NC-AFM image contrast of a quenched Si(111) surface reflected the distribution of the surface potential, while that observed with a feedback of the SKPM signal showed good agreements with the previous results. The experimental results show that the electrostatic force affects the NC-AFM image formation, so that the electrostatic effect must be compensated to obtain an actual surface topography by NC-AFM.

Original languageEnglish
Pages (from-to)L986-L988
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume40
Issue number9 A/B
Publication statusPublished - Sep 15 2001
Externally publishedYes

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Keywords

  • AFM
  • CPD
  • Electrostatic force
  • Noncontact
  • Quenched Si(111)
  • SKPM

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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