The charging mechanism of insulated electrode in negative-ion implantation

Shigeki Sakai, Yasuhito Gotoh, Hiroshi Tsuji, Yoshitaka Toyota, Junzo Ishikawa, Masayasu Tanjyo, Koji Matsuda

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy