Switching control of an air type anti-vibration apparatus under earthquake ground motion

Takashi Ronte, Yukinori Nakamura, Shinji Wakui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents the control method for the continuous operation of semiconductor exposure machines under earthquake ground motion. In our method, floor vibration feedforward control and relative acceleration feedback control are switched on or off, and the gain of the acceleration feedback controller is changed. The acceleration of the floor vibration, the relative displacement between the isolated table and the floor, and the difference of spectral intensity (SI) value are utilized as switching signals. By using the switching control strategy, effects of unknown earthquake can be compensated. The effectiveness of the proposed method is shown by simulation and experimental results.

Original languageEnglish
Title of host publicationProceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society
Pages3788-3793
Number of pages6
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013 - Vienna, Austria
Duration: Nov 10 2013Nov 14 2013

Other

Other39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013
CountryAustria
CityVienna
Period11/10/1311/14/13

Fingerprint

Earthquakes
Air
Acceleration control
Feedforward control
Vibration control
Feedback control
Semiconductor materials
Feedback
Controllers

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Ronte, T., Nakamura, Y., & Wakui, S. (2013). Switching control of an air type anti-vibration apparatus under earthquake ground motion. In Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society (pp. 3788-3793). [6699739] https://doi.org/10.1109/IECON.2013.6699739

Switching control of an air type anti-vibration apparatus under earthquake ground motion. / Ronte, Takashi; Nakamura, Yukinori; Wakui, Shinji.

Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society. 2013. p. 3788-3793 6699739.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ronte, T, Nakamura, Y & Wakui, S 2013, Switching control of an air type anti-vibration apparatus under earthquake ground motion. in Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society., 6699739, pp. 3788-3793, 39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013, Vienna, Austria, 11/10/13. https://doi.org/10.1109/IECON.2013.6699739
Ronte T, Nakamura Y, Wakui S. Switching control of an air type anti-vibration apparatus under earthquake ground motion. In Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society. 2013. p. 3788-3793. 6699739 https://doi.org/10.1109/IECON.2013.6699739
Ronte, Takashi ; Nakamura, Yukinori ; Wakui, Shinji. / Switching control of an air type anti-vibration apparatus under earthquake ground motion. Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society. 2013. pp. 3788-3793
@inproceedings{ba49647932ca48aaa911b1b52f765449,
title = "Switching control of an air type anti-vibration apparatus under earthquake ground motion",
abstract = "This paper presents the control method for the continuous operation of semiconductor exposure machines under earthquake ground motion. In our method, floor vibration feedforward control and relative acceleration feedback control are switched on or off, and the gain of the acceleration feedback controller is changed. The acceleration of the floor vibration, the relative displacement between the isolated table and the floor, and the difference of spectral intensity (SI) value are utilized as switching signals. By using the switching control strategy, effects of unknown earthquake can be compensated. The effectiveness of the proposed method is shown by simulation and experimental results.",
author = "Takashi Ronte and Yukinori Nakamura and Shinji Wakui",
year = "2013",
doi = "10.1109/IECON.2013.6699739",
language = "English",
isbn = "9781479902248",
pages = "3788--3793",
booktitle = "Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society",

}

TY - GEN

T1 - Switching control of an air type anti-vibration apparatus under earthquake ground motion

AU - Ronte, Takashi

AU - Nakamura, Yukinori

AU - Wakui, Shinji

PY - 2013

Y1 - 2013

N2 - This paper presents the control method for the continuous operation of semiconductor exposure machines under earthquake ground motion. In our method, floor vibration feedforward control and relative acceleration feedback control are switched on or off, and the gain of the acceleration feedback controller is changed. The acceleration of the floor vibration, the relative displacement between the isolated table and the floor, and the difference of spectral intensity (SI) value are utilized as switching signals. By using the switching control strategy, effects of unknown earthquake can be compensated. The effectiveness of the proposed method is shown by simulation and experimental results.

AB - This paper presents the control method for the continuous operation of semiconductor exposure machines under earthquake ground motion. In our method, floor vibration feedforward control and relative acceleration feedback control are switched on or off, and the gain of the acceleration feedback controller is changed. The acceleration of the floor vibration, the relative displacement between the isolated table and the floor, and the difference of spectral intensity (SI) value are utilized as switching signals. By using the switching control strategy, effects of unknown earthquake can be compensated. The effectiveness of the proposed method is shown by simulation and experimental results.

UR - http://www.scopus.com/inward/record.url?scp=84893549146&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84893549146&partnerID=8YFLogxK

U2 - 10.1109/IECON.2013.6699739

DO - 10.1109/IECON.2013.6699739

M3 - Conference contribution

SN - 9781479902248

SP - 3788

EP - 3793

BT - Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society

ER -