Switching control of an air type anti-vibration apparatus under earthquake ground motion

Takashi Ronte; Yukinori Nakamura; Shinji Wakui

doi:10.1109/IECON.2013.6699739

Switching control of an air type anti-vibration apparatus under earthquake ground motion

Takashi Ronte, Yukinori Nakamura, Shinji Wakui

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper presents the control method for the continuous operation of semiconductor exposure machines under earthquake ground motion. In our method, floor vibration feedforward control and relative acceleration feedback control are switched on or off, and the gain of the acceleration feedback controller is changed. The acceleration of the floor vibration, the relative displacement between the isolated table and the floor, and the difference of spectral intensity (SI) value are utilized as switching signals. By using the switching control strategy, effects of unknown earthquake can be compensated. The effectiveness of the proposed method is shown by simulation and experimental results.

Original language	English
Title of host publication	Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society
Pages	3788-3793
Number of pages	6
DOIs	https://doi.org/10.1109/IECON.2013.6699739
Publication status	Published - Dec 1 2013
Externally published	Yes
Event	39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013 - Vienna, Austria Duration: Nov 10 2013 → Nov 14 2013

Publication series

Name	IECON Proceedings (Industrial Electronics Conference)

Other

Other	39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013
Country/Territory	Austria
City	Vienna
Period	11/10/13 → 11/14/13

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

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10.1109/IECON.2013.6699739

Cite this

Switching control of an air type anti-vibration apparatus under earthquake ground motion. / Ronte, Takashi; Nakamura, Yukinori; Wakui, Shinji.

Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society. 2013. p. 3788-3793 6699739 (IECON Proceedings (Industrial Electronics Conference)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ronte, T, Nakamura, Y & Wakui, S 2013, Switching control of an air type anti-vibration apparatus under earthquake ground motion. in Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society., 6699739, IECON Proceedings (Industrial Electronics Conference), pp. 3788-3793, 39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013, Vienna, Austria, 11/10/13. https://doi.org/10.1109/IECON.2013.6699739

@inproceedings{ba49647932ca48aaa911b1b52f765449,

title = "Switching control of an air type anti-vibration apparatus under earthquake ground motion",

abstract = "This paper presents the control method for the continuous operation of semiconductor exposure machines under earthquake ground motion. In our method, floor vibration feedforward control and relative acceleration feedback control are switched on or off, and the gain of the acceleration feedback controller is changed. The acceleration of the floor vibration, the relative displacement between the isolated table and the floor, and the difference of spectral intensity (SI) value are utilized as switching signals. By using the switching control strategy, effects of unknown earthquake can be compensated. The effectiveness of the proposed method is shown by simulation and experimental results.",

author = "Takashi Ronte and Yukinori Nakamura and Shinji Wakui",

year = "2013",

month = dec,

day = "1",

doi = "10.1109/IECON.2013.6699739",

language = "English",

isbn = "9781479902248",

series = "IECON Proceedings (Industrial Electronics Conference)",

pages = "3788--3793",

booktitle = "Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society",

note = "39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013 ; Conference date: 10-11-2013 Through 14-11-2013",

}

TY - GEN

T1 - Switching control of an air type anti-vibration apparatus under earthquake ground motion

AU - Ronte, Takashi

AU - Nakamura, Yukinori

AU - Wakui, Shinji

PY - 2013/12/1

Y1 - 2013/12/1

N2 - This paper presents the control method for the continuous operation of semiconductor exposure machines under earthquake ground motion. In our method, floor vibration feedforward control and relative acceleration feedback control are switched on or off, and the gain of the acceleration feedback controller is changed. The acceleration of the floor vibration, the relative displacement between the isolated table and the floor, and the difference of spectral intensity (SI) value are utilized as switching signals. By using the switching control strategy, effects of unknown earthquake can be compensated. The effectiveness of the proposed method is shown by simulation and experimental results.

AB - This paper presents the control method for the continuous operation of semiconductor exposure machines under earthquake ground motion. In our method, floor vibration feedforward control and relative acceleration feedback control are switched on or off, and the gain of the acceleration feedback controller is changed. The acceleration of the floor vibration, the relative displacement between the isolated table and the floor, and the difference of spectral intensity (SI) value are utilized as switching signals. By using the switching control strategy, effects of unknown earthquake can be compensated. The effectiveness of the proposed method is shown by simulation and experimental results.

UR - http://www.scopus.com/inward/record.url?scp=84893549146&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84893549146&partnerID=8YFLogxK

U2 - 10.1109/IECON.2013.6699739

DO - 10.1109/IECON.2013.6699739

M3 - Conference contribution

AN - SCOPUS:84893549146

SN - 9781479902248

T3 - IECON Proceedings (Industrial Electronics Conference)

SP - 3788

EP - 3793

BT - Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society

T2 - 39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013

Y2 - 10 November 2013 through 14 November 2013

ER -

Switching control of an air type anti-vibration apparatus under earthquake ground motion

Abstract

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