Surface reaction of a low flux atomic oxygen beam with a spin-coated polyimide film: Translational energy dependence on the reaction efficiency

Hiroshi Kinoshita, Masahito Tagawa, Masataka Umeno, Nobuo Ohmae

Research output: Contribution to journalArticle

20 Citations (Scopus)

Fingerprint Dive into the research topics of 'Surface reaction of a low flux atomic oxygen beam with a spin-coated polyimide film: Translational energy dependence on the reaction efficiency'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Earth & Environmental Sciences