Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation

Hiroshi Tsuji, Yoshitaka Toyota, Syoji Nagumo, Yasuhito Gotoh, Junzo Ishikawa, Shigeki Sakai, Masayasu Taniyo, Kohji Matsuda

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)139-142
Number of pages4
JournalShinku
Volume37
Issue number3
DOIs
Publication statusPublished - 1994
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Tsuji, H., Toyota, Y., Nagumo, S., Gotoh, Y., Ishikawa, J., Sakai, S., Taniyo, M., & Matsuda, K. (1994). Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation. Shinku, 37(3), 139-142. https://doi.org/10.3131/jvsj.37.139