Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation

Hiroshi Tsuji, Yoshitaka Toyota, Syoji Nagumo, Yasuhito Gotoh, Junzo Ishikawa, Shigeki Sakai, Masayasu Taniyo, Kohji Matsuda

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)139-142
Number of pages4
JournalShinku
Volume37
Issue number3
DOIs
Publication statusPublished - 1994
Externally publishedYes

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Surface potential
Ion implantation
negative ions
ion implantation
Negative ions
insulators
Electrons
electrons

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation. / Tsuji, Hiroshi; Toyota, Yoshitaka; Nagumo, Syoji; Gotoh, Yasuhito; Ishikawa, Junzo; Sakai, Shigeki; Taniyo, Masayasu; Matsuda, Kohji.

In: Shinku, Vol. 37, No. 3, 1994, p. 139-142.

Research output: Contribution to journalArticle

Tsuji, H, Toyota, Y, Nagumo, S, Gotoh, Y, Ishikawa, J, Sakai, S, Taniyo, M & Matsuda, K 1994, 'Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation', Shinku, vol. 37, no. 3, pp. 139-142. https://doi.org/10.3131/jvsj.37.139
Tsuji, Hiroshi ; Toyota, Yoshitaka ; Nagumo, Syoji ; Gotoh, Yasuhito ; Ishikawa, Junzo ; Sakai, Shigeki ; Taniyo, Masayasu ; Matsuda, Kohji. / Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation. In: Shinku. 1994 ; Vol. 37, No. 3. pp. 139-142.
@article{6d6a156167644021a05afae61191b3ee,
title = "Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation",
author = "Hiroshi Tsuji and Yoshitaka Toyota and Syoji Nagumo and Yasuhito Gotoh and Junzo Ishikawa and Shigeki Sakai and Masayasu Taniyo and Kohji Matsuda",
year = "1994",
doi = "10.3131/jvsj.37.139",
language = "English",
volume = "37",
pages = "139--142",
journal = "Journal of the Vacuum Society of Japan",
issn = "1882-2398",
publisher = "Vacuum Society of Japan",
number = "3",

}

TY - JOUR

T1 - Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation

AU - Tsuji, Hiroshi

AU - Toyota, Yoshitaka

AU - Nagumo, Syoji

AU - Gotoh, Yasuhito

AU - Ishikawa, Junzo

AU - Sakai, Shigeki

AU - Taniyo, Masayasu

AU - Matsuda, Kohji

PY - 1994

Y1 - 1994

UR - http://www.scopus.com/inward/record.url?scp=85008285256&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85008285256&partnerID=8YFLogxK

U2 - 10.3131/jvsj.37.139

DO - 10.3131/jvsj.37.139

M3 - Article

VL - 37

SP - 139

EP - 142

JO - Journal of the Vacuum Society of Japan

JF - Journal of the Vacuum Society of Japan

SN - 1882-2398

IS - 3

ER -