Suppression of vibration induced by reciprocal motion of displacer in cryopump with an active dynamic vibration absorber

Takeshi Mizuno; Takahito Iida; Yuji Ishino; Masaya Takasaki; Daisuke Yamaguchi

doi:10.1016/j.ifacol.2019.11.730

Suppression of vibration induced by reciprocal motion of displacer in cryopump with an active dynamic vibration absorber

Takeshi Mizuno, Takahito Iida, Yuji Ishino, Masaya Takasaki, Daisuke Yamaguchi

Research output: Contribution to journal › Conference article › peer-review

Abstract

An active dynamic vibration absorber is introduced to a cyropump system achieving ultra-high vacuum and extremely low temperature environments for fine observation and high-accuracy measurement. In a cryopump, a so-called displacer moves reciprocally for alternative adiabatic expansion and exhaust of helium gas. Such a motion induces vibration in the vacuum chamber on which the pump is fixed. It may negatively affect observation and measurement performed in the chamber. To remove this vibration effectively, an active dynamic vibration absorber is designed, fabricated and installed in the system. Both empirical and model-based approaches are applied in reducing vibration at multiple specified frequencies. Finally, the vibration is almost eliminated at five specified frequencies.

Original language	English
Pages (from-to)	531-536
Number of pages	6
Journal	IFAC-PapersOnLine
Volume	52
Issue number	15
DOIs	https://doi.org/10.1016/j.ifacol.2019.11.730
Publication status	Published - Sep 2019
Externally published	Yes
Event	8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Austria Duration: Sep 4 2019 → Sep 6 2019

Keywords

Actuators
Dampers
Disturbance rejection
Eigenvalue assignment
Electromagnetic devices
Mechanisms
Model based control
Vibration control

ASJC Scopus subject areas

Control and Systems Engineering

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title = "Suppression of vibration induced by reciprocal motion of displacer in cryopump with an active dynamic vibration absorber",

abstract = "An active dynamic vibration absorber is introduced to a cyropump system achieving ultra-high vacuum and extremely low temperature environments for fine observation and high-accuracy measurement. In a cryopump, a so-called displacer moves reciprocally for alternative adiabatic expansion and exhaust of helium gas. Such a motion induces vibration in the vacuum chamber on which the pump is fixed. It may negatively affect observation and measurement performed in the chamber. To remove this vibration effectively, an active dynamic vibration absorber is designed, fabricated and installed in the system. Both empirical and model-based approaches are applied in reducing vibration at multiple specified frequencies. Finally, the vibration is almost eliminated at five specified frequencies.",

keywords = "Actuators, Dampers, Disturbance rejection, Eigenvalue assignment, Electromagnetic devices, Mechanisms, Model based control, Vibration control",

author = "Takeshi Mizuno and Takahito Iida and Yuji Ishino and Masaya Takasaki and Daisuke Yamaguchi",

note = "Funding Information: This project was supported by JSPS and UGC under the JapanBangladesh Research Cooperative Program, and by the Regional Industry-Academia Value Program from JST (VP29117939345). Funding Information: This pro:ect was supported by SPS and ) under the apan-angladesh Research ooperative Program, and by the Regional Industry-Academia Value Program from ST (VP29117939345).; 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 ; Conference date: 04-09-2019 Through 06-09-2019",

year = "2019",

month = sep,

doi = "10.1016/j.ifacol.2019.11.730",

language = "English",

volume = "52",

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TY - JOUR

T1 - Suppression of vibration induced by reciprocal motion of displacer in cryopump with an active dynamic vibration absorber

AU - Mizuno, Takeshi

AU - Iida, Takahito

AU - Ishino, Yuji

AU - Takasaki, Masaya

AU - Yamaguchi, Daisuke

N1 - Funding Information: This project was supported by JSPS and UGC under the JapanBangladesh Research Cooperative Program, and by the Regional Industry-Academia Value Program from JST (VP29117939345). Funding Information: This pro:ect was supported by SPS and ) under the apan-angladesh Research ooperative Program, and by the Regional Industry-Academia Value Program from ST (VP29117939345).

PY - 2019/9

Y1 - 2019/9

N2 - An active dynamic vibration absorber is introduced to a cyropump system achieving ultra-high vacuum and extremely low temperature environments for fine observation and high-accuracy measurement. In a cryopump, a so-called displacer moves reciprocally for alternative adiabatic expansion and exhaust of helium gas. Such a motion induces vibration in the vacuum chamber on which the pump is fixed. It may negatively affect observation and measurement performed in the chamber. To remove this vibration effectively, an active dynamic vibration absorber is designed, fabricated and installed in the system. Both empirical and model-based approaches are applied in reducing vibration at multiple specified frequencies. Finally, the vibration is almost eliminated at five specified frequencies.

AB - An active dynamic vibration absorber is introduced to a cyropump system achieving ultra-high vacuum and extremely low temperature environments for fine observation and high-accuracy measurement. In a cryopump, a so-called displacer moves reciprocally for alternative adiabatic expansion and exhaust of helium gas. Such a motion induces vibration in the vacuum chamber on which the pump is fixed. It may negatively affect observation and measurement performed in the chamber. To remove this vibration effectively, an active dynamic vibration absorber is designed, fabricated and installed in the system. Both empirical and model-based approaches are applied in reducing vibration at multiple specified frequencies. Finally, the vibration is almost eliminated at five specified frequencies.

KW - Actuators

KW - Dampers

KW - Disturbance rejection

KW - Eigenvalue assignment

KW - Electromagnetic devices

KW - Mechanisms

KW - Model based control

KW - Vibration control

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DO - 10.1016/j.ifacol.2019.11.730

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SP - 531

EP - 536

JO - IFAC-PapersOnLine

JF - IFAC-PapersOnLine

SN - 2405-8963

IS - 15

T2 - 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019

Y2 - 4 September 2019 through 6 September 2019

ER -

Suppression of vibration induced by reciprocal motion of displacer in cryopump with an active dynamic vibration absorber

Abstract

Keywords

ASJC Scopus subject areas

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