Suppression of vibration induced by reciprocal motion of displacer in cryopump with an active dynamic vibration absorber

Takeshi Mizuno, Takahito Iida, Yuji Ishino, Masaya Takasaki, Daisuke Yamaguchi

Research output: Contribution to journalConference articlepeer-review

Abstract

An active dynamic vibration absorber is introduced to a cyropump system achieving ultra-high vacuum and extremely low temperature environments for fine observation and high-accuracy measurement. In a cryopump, a so-called displacer moves reciprocally for alternative adiabatic expansion and exhaust of helium gas. Such a motion induces vibration in the vacuum chamber on which the pump is fixed. It may negatively affect observation and measurement performed in the chamber. To remove this vibration effectively, an active dynamic vibration absorber is designed, fabricated and installed in the system. Both empirical and model-based approaches are applied in reducing vibration at multiple specified frequencies. Finally, the vibration is almost eliminated at five specified frequencies.

Original languageEnglish
Pages (from-to)531-536
Number of pages6
JournalIFAC-PapersOnLine
Volume52
Issue number15
DOIs
Publication statusPublished - Sep 2019
Event8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Austria
Duration: Sep 4 2019Sep 6 2019

Keywords

  • Actuators
  • Dampers
  • Disturbance rejection
  • Eigenvalue assignment
  • Electromagnetic devices
  • Mechanisms
  • Model based control
  • Vibration control

ASJC Scopus subject areas

  • Control and Systems Engineering

Fingerprint Dive into the research topics of 'Suppression of vibration induced by reciprocal motion of displacer in cryopump with an active dynamic vibration absorber'. Together they form a unique fingerprint.

Cite this