Abstract
An active dynamic vibration absorber is introduced to a cyropump system achieving ultra-high vacuum and extremely low temperature environments for fine observation and high-accuracy measurement. In a cryopump, a so-called displacer moves reciprocally for alternative adiabatic expansion and exhaust of helium gas. Such a motion induces vibration in the vacuum chamber on which the pump is fixed. It may negatively affect observation and measurement performed in the chamber. To remove this vibration effectively, an active dynamic vibration absorber is designed, fabricated and installed in the system. Both empirical and model-based approaches are applied in reducing vibration at multiple specified frequencies. Finally, the vibration is almost eliminated at five specified frequencies.
Original language | English |
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Pages (from-to) | 531-536 |
Number of pages | 6 |
Journal | IFAC-PapersOnLine |
Volume | 52 |
Issue number | 15 |
DOIs | |
Publication status | Published - Sep 2019 |
Externally published | Yes |
Event | 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Austria Duration: Sep 4 2019 → Sep 6 2019 |
Keywords
- Actuators
- Dampers
- Disturbance rejection
- Eigenvalue assignment
- Electromagnetic devices
- Mechanisms
- Model based control
- Vibration control
ASJC Scopus subject areas
- Control and Systems Engineering