Suppression of isolation table's fluctuation due to switching of feedforward controller

Habiburahman Shirani, Yukinori Nakamura, Shinji Wakui

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

To avoid a longer settling time of an isolation table, switching of the feedforward controller which is used for the control of supplied air's disturbances, is needed after starting and prior to stopping the table. However, this switching also causes the fluctuation of the table. In order to suppress the fluctuation of the table caused by switching, this study uses a difference operator before the feedforward compensator and the combination of feedforward and feedback loops. The effectiveness of this method is experimentally demonstrated.

Original languageEnglish
Pages (from-to)295-301
Number of pages7
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Volume5
Issue number4
DOIs
Publication statusPublished - 2011
Externally publishedYes

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Keywords

  • Feedforward Compensator
  • Flow Disturbance
  • Pneumatic Isolation Table
  • Supplied Air
  • Switching
  • Voice Coil Motor

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

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