Sub-10-nm electron beam lithography with sub-10-nm overlay accuracy

Kenji Yamazaki, Mohammad S.M. Saifullah, Hideo Namatsu, Kenji Kurihara

Research output: Contribution to journalConference articlepeer-review

8 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Sub-10-nm electron beam lithography with sub-10-nm overlay accuracy'. Together they form a unique fingerprint.

Mathematics

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy