Study on Fine Boring of Single Crystalline Silicon by EDM

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)9-16
Number of pages8
JournalJournal of the Japan Society of Electrical-Machining Engineers
Volume30
Issue number65
Publication statusPublished - 1996

Cite this

Study on Fine Boring of Single Crystalline Silicon by EDM. / Okada, Akira.

In: Journal of the Japan Society of Electrical-Machining Engineers, Vol. 30, No. 65, 1996, p. 9-16.

Research output: Contribution to journalArticle

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title = "Study on Fine Boring of Single Crystalline Silicon by EDM",
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year = "1996",
language = "English",
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journal = "Journal of the Japan Society of Electrical-Machining Engineers",
number = "65",

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EP - 16

JO - Journal of the Japan Society of Electrical-Machining Engineers

JF - Journal of the Japan Society of Electrical-Machining Engineers

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