| Original language | English |
|---|---|
| Pages (from-to) | 9-16 |
| Number of pages | 8 |
| Journal | Journal of the Japan Society of Electrical-Machining Engineers |
| Volume | 30 |
| Issue number | 65 |
| Publication status | Published - 1996 |
Study on Fine Boring of Single Crystalline Silicon by EDM
Research output: Contribution to journal › Article