| Original language | English |
|---|---|
| Pages (from-to) | 9-16 |
| Number of pages | 8 |
| Journal | Journal of the Japan Society of Electrical-Machining Engineers |
| Volume | 30 |
| Issue number | 65 |
| Publication status | Published - 1996 |
Cite this
Study on Fine Boring of Single Crystalline Silicon by EDM. / Okada, Akira.
In: Journal of the Japan Society of Electrical-Machining Engineers, Vol. 30, No. 65, 1996, p. 9-16.Research output: Contribution to journal › Article
Okada, A 1996, 'Study on Fine Boring of Single Crystalline Silicon by EDM', Journal of the Japan Society of Electrical-Machining Engineers, vol. 30, no. 65, pp. 9-16.
@article{3d5a81088b1749e9b8f9c4aebd8c0360,
title = "Study on Fine Boring of Single Crystalline Silicon by EDM",
author = "Akira Okada",
year = "1996",
language = "English",
volume = "30",
pages = "9--16",
journal = "Journal of the Japan Society of Electrical-Machining Engineers",
number = "65",
}
TY - JOUR
T1 - Study on Fine Boring of Single Crystalline Silicon by EDM
AU - Okada, Akira
PY - 1996
Y1 - 1996
M3 - Article
VL - 30
SP - 9
EP - 16
JO - Journal of the Japan Society of Electrical-Machining Engineers
JF - Journal of the Japan Society of Electrical-Machining Engineers
IS - 65
ER -