Study on detection of earthquake using di value and its application to switching control for air type anti-vibration apparatus

Masayuki Kubota, Hirokazu Mineo, Shinji Wakui, Yukinori Nakamura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In semiconductor manufacturing, air type-vibration apparatuses (AVAs) are widely employed. When an earthquake occurs, the AVAs have to be stopped in order to avoid serious damage to semiconductor exposure machines. Spectrum intensity (SI) value is the metric effective for the detection of earthquake though it takes time to calculate this value. To avoid long computation time, this paper uses destructive intensity (DI) value instead of SI value. Simulation demonstrates that DI value, whose computation time is short, can be applied to switching control for AVAs.

Original languageEnglish
Title of host publication2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015
PublisherIEEE Computer Society
Pages158-163
Number of pages6
Volume2015-October
ISBN (Electronic)9781467379960
DOIs
Publication statusPublished - Oct 1 2015
Externally publishedYes
EventInternational Conference on Advanced Mechatronic Systems, ICAMechS 2015 - Beijing, China
Duration: Aug 22 2015Aug 24 2015

Other

OtherInternational Conference on Advanced Mechatronic Systems, ICAMechS 2015
CountryChina
CityBeijing
Period8/22/158/24/15

Keywords

  • destructive intensity
  • pneumatic anti-vibration apparatus
  • spectrum intensity
  • switching control
  • trade-off

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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  • Cite this

    Kubota, M., Mineo, H., Wakui, S., & Nakamura, Y. (2015). Study on detection of earthquake using di value and its application to switching control for air type anti-vibration apparatus. In 2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015 (Vol. 2015-October, pp. 158-163). [7287147] IEEE Computer Society. https://doi.org/10.1109/ICAMechS.2015.7287147