Stress measurement of carbon cluster implanted layers with in-plane diffraction technique

Jiro Matsuo, Kazuya Ichiki, Masaki Hada, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Tsutomu Nagayama, Masayasu Tanjyo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science