Spin-coated Ta2O5·nH2O films derived from peroxo poly-tantalate solution

A. Kishimoto; T. Nanba; T. Kudo

doi:10.1016/0167-2738(90)90149-L

Spin-coated Ta₂O₅·nH₂O films derived from peroxo poly-tantalate solution

A. Kishimoto, T. Nanba, T. Kudo

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Peroxo-tantalic acid solution was obtained by direct reaction of Ta(OC₂H₅) with H₂O₂. It turned into amorphous Ta₂O₅· nH₂O when dried. Thermal analysis revealed that Ta₂O₅·nH₂O thus formed underwent three-step thermal decomposition. Final product up to 700°C was hexagonal tantalum oxide. Electrical conductivity of spin-coated Ta₂O₅·nH₂O was measured with ac impedance method, revealing that temperature and humidity dependence of ionic conductivity (4.3×10^-7 S cm^-1 at 27°C) was very small.

Original language	English
Pages (from-to)	903-905
Number of pages	3
Journal	Solid State Ionics
Volume	40-41
Issue number	PART 2
DOIs	https://doi.org/10.1016/0167-2738(90)90149-L
Publication status	Published - Aug 1990
Externally published	Yes

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)
Condensed Matter Physics

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title = "Spin-coated Ta2O5·nH2O films derived from peroxo poly-tantalate solution",

abstract = "Peroxo-tantalic acid solution was obtained by direct reaction of Ta(OC2H5) with H2O2. It turned into amorphous Ta2O5· nH2O when dried. Thermal analysis revealed that Ta2O5·nH2O thus formed underwent three-step thermal decomposition. Final product up to 700°C was hexagonal tantalum oxide. Electrical conductivity of spin-coated Ta2O5·nH2O was measured with ac impedance method, revealing that temperature and humidity dependence of ionic conductivity (4.3×10-7 S cm-1 at 27°C) was very small.",

author = "A. Kishimoto and T. Nanba and T. Kudo",

year = "1990",

month = aug,

doi = "10.1016/0167-2738(90)90149-L",

language = "English",

volume = "40-41",

pages = "903--905",

journal = "Solid State Ionics",

issn = "0167-2738",

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T1 - Spin-coated Ta2O5·nH2O films derived from peroxo poly-tantalate solution

AU - Kishimoto, A.

AU - Nanba, T.

AU - Kudo, T.

PY - 1990/8

Y1 - 1990/8

N2 - Peroxo-tantalic acid solution was obtained by direct reaction of Ta(OC2H5) with H2O2. It turned into amorphous Ta2O5· nH2O when dried. Thermal analysis revealed that Ta2O5·nH2O thus formed underwent three-step thermal decomposition. Final product up to 700°C was hexagonal tantalum oxide. Electrical conductivity of spin-coated Ta2O5·nH2O was measured with ac impedance method, revealing that temperature and humidity dependence of ionic conductivity (4.3×10-7 S cm-1 at 27°C) was very small.

AB - Peroxo-tantalic acid solution was obtained by direct reaction of Ta(OC2H5) with H2O2. It turned into amorphous Ta2O5· nH2O when dried. Thermal analysis revealed that Ta2O5·nH2O thus formed underwent three-step thermal decomposition. Final product up to 700°C was hexagonal tantalum oxide. Electrical conductivity of spin-coated Ta2O5·nH2O was measured with ac impedance method, revealing that temperature and humidity dependence of ionic conductivity (4.3×10-7 S cm-1 at 27°C) was very small.

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Spin-coated Ta₂O₅·nH₂O films derived from peroxo poly-tantalate solution

Abstract

ASJC Scopus subject areas

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