Spin-coated Ta2O5·nH2O films derived from peroxo poly-tantalate solution

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7 Citations (Scopus)

Abstract

Peroxo-tantalic acid solution was obtained by direct reaction of Ta(OC2H5) with H2O2. It turned into amorphous Ta2O5· nH2O when dried. Thermal analysis revealed that Ta2O5·nH2O thus formed underwent three-step thermal decomposition. Final product up to 700°C was hexagonal tantalum oxide. Electrical conductivity of spin-coated Ta2O5·nH2O was measured with ac impedance method, revealing that temperature and humidity dependence of ionic conductivity (4.3×10-7 S cm-1 at 27°C) was very small.

Original languageEnglish
Pages (from-to)903-905
Number of pages3
JournalSolid State Ionics
Volume40-41
Issue numberPART 2
DOIs
Publication statusPublished - Aug 1990
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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