Soft-switching technique applicable to capacitive load for resonant inverter of plasma generator

Koji Itakura, Hiroaki Kakemizu, Hiroki Nakaido, Kazuhiro Umetani, Eiji Hiraki, Tatsuya Ikenari, Shingo Kawano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Recently, resonant inverters have been employed to generate high voltage high frequency AC power for plasma generator of the semiconductor processing equipment. This inverter is beneficial in low switching loss owing to its natural soft-switching capability under inductive load impedance. Generally, the resonant inverter for plasma generator is designed to have inductive load using an impedance matching circuit that interfaces the inverter and the plasma reactor. However, the load impedance often fluctuates according to the state of the plasma, momentarily causing the capacitive load impedance. In this case, the inverter is generally controlled to restrict the output power for circuit protection from excessive switching loss, although this will result in unstable plasma, deteriorating the quality of the semiconductor processing. This paper addressed this difficulty by applying a soft-switching technique to the resonant inverter. This soft-switching technique can be utilized regardless to the capacitive or inductive load. Experiment was carried out to evaluate the effectiveness of the proposed technique. As a result, the effective reduction of the switching loss was successfully verified even under the capacitive load impedance.

Original languageEnglish
Title of host publicationProceedings IECON 2017 - 43rd Annual Conference of the IEEE Industrial Electronics Society
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1556-1562
Number of pages7
Volume2017-January
ISBN (Electronic)9781538611272
DOIs
Publication statusPublished - Dec 15 2017
Event43rd Annual Conference of the IEEE Industrial Electronics Society, IECON 2017 - Beijing, China
Duration: Oct 29 2017Nov 1 2017

Other

Other43rd Annual Conference of the IEEE Industrial Electronics Society, IECON 2017
CountryChina
CityBeijing
Period10/29/1711/1/17

Keywords

  • capacitive load
  • plasma generator
  • resonant inverter
  • soft-switching

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Control and Optimization
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Soft-switching technique applicable to capacitive load for resonant inverter of plasma generator'. Together they form a unique fingerprint.

  • Cite this

    Itakura, K., Kakemizu, H., Nakaido, H., Umetani, K., Hiraki, E., Ikenari, T., & Kawano, S. (2017). Soft-switching technique applicable to capacitive load for resonant inverter of plasma generator. In Proceedings IECON 2017 - 43rd Annual Conference of the IEEE Industrial Electronics Society (Vol. 2017-January, pp. 1556-1562). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IECON.2017.8216264