Abstract
esonant inverters are widely utilized to generate high-frequency high voltage A C power for the power supply to the plasma generator. These inverters commonly require the load impedance to be inductive for achieving soft-switching operation. However, the impedance often fluctuates to be momentarily capacitive due to the unstable state of the plasma, thus causing enormous switching loss and possibly destroying the inverters. This paper addresses this difficulty by using a recently-proposed resonant inverter that can achieve soft-switching operation under the capacitive load impedance. For this purpose, this paper proposes a novel soft-switching controller for applying this inverter for plasma generator application. The proposed controller observes the load impedance and controls the resonant inverter according to the impedance value. Because of the high-frequency A C power supply to the plasma generator, the voltage and current measurement are difficult for estimation of the load impedance. Therefore, the proposed controller estimates the load impedance based on traveling and reflected wave measurement. The experiment revealed successful control of the inverter according to the load impedance, suggesting high feasibility for applying the inverter to the plasma generator.
| Original language | English |
|---|---|
| Title of host publication | Proceedings |
| Subtitle of host publication | IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 3051-3056 |
| Number of pages | 6 |
| ISBN (Electronic) | 9781509066841 |
| DOIs | |
| Publication status | Published - Dec 26 2018 |
| Event | 44th Annual Conference of the IEEE Industrial Electronics Society, IECON 2018 - Washington, United States Duration: Oct 20 2018 → Oct 23 2018 |
Publication series
| Name | Proceedings: IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society |
|---|
Conference
| Conference | 44th Annual Conference of the IEEE Industrial Electronics Society, IECON 2018 |
|---|---|
| Country | United States |
| City | Washington |
| Period | 10/20/18 → 10/23/18 |
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Keywords
- Plasma generator
- Rectional coupler
- Resonant inverter
- Soft-switching
ASJC Scopus subject areas
- Energy Engineering and Power Technology
- Electrical and Electronic Engineering
- Industrial and Manufacturing Engineering
- Control and Optimization
Cite this
Soft-switching control circuit based on traveling and reflected waves for high-frequency resonant inverter applicable to capacitive load impedance. / Oyane, Aoi; Itakura, Koji; Umetani, Kazuhiro; Hiraki, Eiji; Ikenari, Tatsuya; Kawano, Shingo.
Proceedings: IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society. Institute of Electrical and Electronics Engineers Inc., 2018. p. 3051-3056 8592832 (Proceedings: IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Soft-switching control circuit based on traveling and reflected waves for high-frequency resonant inverter applicable to capacitive load impedance
AU - Oyane, Aoi
AU - Itakura, Koji
AU - Umetani, Kazuhiro
AU - Hiraki, Eiji
AU - Ikenari, Tatsuya
AU - Kawano, Shingo
PY - 2018/12/26
Y1 - 2018/12/26
N2 - esonant inverters are widely utilized to generate high-frequency high voltage A C power for the power supply to the plasma generator. These inverters commonly require the load impedance to be inductive for achieving soft-switching operation. However, the impedance often fluctuates to be momentarily capacitive due to the unstable state of the plasma, thus causing enormous switching loss and possibly destroying the inverters. This paper addresses this difficulty by using a recently-proposed resonant inverter that can achieve soft-switching operation under the capacitive load impedance. For this purpose, this paper proposes a novel soft-switching controller for applying this inverter for plasma generator application. The proposed controller observes the load impedance and controls the resonant inverter according to the impedance value. Because of the high-frequency A C power supply to the plasma generator, the voltage and current measurement are difficult for estimation of the load impedance. Therefore, the proposed controller estimates the load impedance based on traveling and reflected wave measurement. The experiment revealed successful control of the inverter according to the load impedance, suggesting high feasibility for applying the inverter to the plasma generator.
AB - esonant inverters are widely utilized to generate high-frequency high voltage A C power for the power supply to the plasma generator. These inverters commonly require the load impedance to be inductive for achieving soft-switching operation. However, the impedance often fluctuates to be momentarily capacitive due to the unstable state of the plasma, thus causing enormous switching loss and possibly destroying the inverters. This paper addresses this difficulty by using a recently-proposed resonant inverter that can achieve soft-switching operation under the capacitive load impedance. For this purpose, this paper proposes a novel soft-switching controller for applying this inverter for plasma generator application. The proposed controller observes the load impedance and controls the resonant inverter according to the impedance value. Because of the high-frequency A C power supply to the plasma generator, the voltage and current measurement are difficult for estimation of the load impedance. Therefore, the proposed controller estimates the load impedance based on traveling and reflected wave measurement. The experiment revealed successful control of the inverter according to the load impedance, suggesting high feasibility for applying the inverter to the plasma generator.
KW - Plasma generator
KW - Rectional coupler
KW - Resonant inverter
KW - Soft-switching
UR - http://www.scopus.com/inward/record.url?scp=85061553361&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85061553361&partnerID=8YFLogxK
U2 - 10.1109/IECON.2018.8592832
DO - 10.1109/IECON.2018.8592832
M3 - Conference contribution
AN - SCOPUS:85061553361
T3 - Proceedings: IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society
SP - 3051
EP - 3056
BT - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
ER -