Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom

Satoru Goto, Yukinori Nakamura, Shinji Wakui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Pneumatic anti-vibration apparatuses (AVAs), which have air springs, are needed for the precision positioning of wafer stages in lithography equipment. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including difference time delays. To avoid the rotation of the isolated table, a Smith predictor is employed. It is verified that this approach can be used for the AVAs with mode control, which is often used in vibration isolation systems for semiconductor manufacturing. The overshoot of the rotational angle of the isolated table can be further reduced by shaping the reference trajectory.

Original languageEnglish
Title of host publicationAIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages137-142
Number of pages6
ISBN (Print)9781479957361
DOIs
Publication statusPublished - Jan 1 2014
Externally publishedYes
Event2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France
Duration: Jul 8 2014Jul 11 2014

Publication series

NameIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Other

Other2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
CountryFrance
CityBesancon
Period7/8/147/11/14

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ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Goto, S., Nakamura, Y., & Wakui, S. (2014). Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom. In AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics (pp. 137-142). [6878068] (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AIM.2014.6878068