Abstract
Pneumatic anti-vibration apparatuses (AVAs), which have air springs, are needed for the precision positioning of wafer stages in lithography equipment. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including difference time delays. To avoid the rotation of the isolated table, a Smith predictor is employed. It is verified that this approach can be used for the AVAs with mode control, which is often used in vibration isolation systems for semiconductor manufacturing. The overshoot of the rotational angle of the isolated table can be further reduced by shaping the reference trajectory.
| Original language | English |
|---|---|
| Title of host publication | AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 137-142 |
| Number of pages | 6 |
| ISBN (Print) | 9781479957361 |
| DOIs | |
| Publication status | Published - 2014 |
| Externally published | Yes |
| Event | 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France Duration: Jul 8 2014 → Jul 11 2014 |
Other
| Other | 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 |
|---|---|
| Country | France |
| City | Besancon |
| Period | 7/8/14 → 7/11/14 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Control and Systems Engineering
- Computer Science Applications
- Software
Cite this
Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom. / Goto, Satoru; Nakamura, Yukinori; Wakui, Shinji.
AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Institute of Electrical and Electronics Engineers Inc., 2014. p. 137-142 6878068.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom
AU - Goto, Satoru
AU - Nakamura, Yukinori
AU - Wakui, Shinji
PY - 2014
Y1 - 2014
N2 - Pneumatic anti-vibration apparatuses (AVAs), which have air springs, are needed for the precision positioning of wafer stages in lithography equipment. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including difference time delays. To avoid the rotation of the isolated table, a Smith predictor is employed. It is verified that this approach can be used for the AVAs with mode control, which is often used in vibration isolation systems for semiconductor manufacturing. The overshoot of the rotational angle of the isolated table can be further reduced by shaping the reference trajectory.
AB - Pneumatic anti-vibration apparatuses (AVAs), which have air springs, are needed for the precision positioning of wafer stages in lithography equipment. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including difference time delays. To avoid the rotation of the isolated table, a Smith predictor is employed. It is verified that this approach can be used for the AVAs with mode control, which is often used in vibration isolation systems for semiconductor manufacturing. The overshoot of the rotational angle of the isolated table can be further reduced by shaping the reference trajectory.
UR - http://www.scopus.com/inward/record.url?scp=84906653268&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84906653268&partnerID=8YFLogxK
U2 - 10.1109/AIM.2014.6878068
DO - 10.1109/AIM.2014.6878068
M3 - Conference contribution
SN - 9781479957361
SP - 137
EP - 142
BT - AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
PB - Institute of Electrical and Electronics Engineers Inc.
ER -