Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom

Satoru Goto; Yukinori Nakamura; Shinji Wakui

doi:10.1109/AIM.2014.6878068

Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom

Satoru Goto, Yukinori Nakamura, Shinji Wakui

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

Pneumatic anti-vibration apparatuses (AVAs), which have air springs, are needed for the precision positioning of wafer stages in lithography equipment. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including difference time delays. To avoid the rotation of the isolated table, a Smith predictor is employed. It is verified that this approach can be used for the AVAs with mode control, which is often used in vibration isolation systems for semiconductor manufacturing. The overshoot of the rotational angle of the isolated table can be further reduced by shaping the reference trajectory.

Original language	English
Title of host publication	AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	137-142
Number of pages	6
ISBN (Print)	9781479957361
DOIs	https://doi.org/10.1109/AIM.2014.6878068
Publication status	Published - Jan 1 2014
Externally published	Yes
Event	2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France Duration: Jul 8 2014 → Jul 11 2014

Publication series

Name	IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Other

Other	2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
Country	France
City	Besancon
Period	7/8/14 → 7/11/14

ASJC Scopus subject areas

Control and Systems Engineering
Software
Computer Science Applications
Electrical and Electronic Engineering

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10.1109/AIM.2014.6878068

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Goto, S., Nakamura, Y., & Wakui, S. (2014). Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom. In AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics (pp. 137-142). [6878068] (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AIM.2014.6878068

Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom. / Goto, Satoru; Nakamura, Yukinori; Wakui, Shinji.

AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Institute of Electrical and Electronics Engineers Inc., 2014. p. 137-142 6878068 (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Goto, S, Nakamura, Y & Wakui, S 2014, Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom. in AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics., 6878068, IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM, Institute of Electrical and Electronics Engineers Inc., pp. 137-142, 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, 7/8/14. https://doi.org/10.1109/AIM.2014.6878068

Goto S, Nakamura Y, Wakui S. Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom. In AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Institute of Electrical and Electronics Engineers Inc. 2014. p. 137-142. 6878068. (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM). https://doi.org/10.1109/AIM.2014.6878068

Goto, Satoru ; Nakamura, Yukinori ; Wakui, Shinji. / Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom. AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 137-142 (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM).

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abstract = "Pneumatic anti-vibration apparatuses (AVAs), which have air springs, are needed for the precision positioning of wafer stages in lithography equipment. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including difference time delays. To avoid the rotation of the isolated table, a Smith predictor is employed. It is verified that this approach can be used for the AVAs with mode control, which is often used in vibration isolation systems for semiconductor manufacturing. The overshoot of the rotational angle of the isolated table can be further reduced by shaping the reference trajectory.",

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Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom

Abstract

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