Site-selective metal deposition on 3D micro/nanostructures fabricated by two-photon polymerization

N. Takeyasu, F. Formanek, K. Chiyoda, T. Tanaka, A. Ishikawa, S. Kawata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Recently, fabrication of metal micro-pattern has attracted a great attention. For such purpose, site-selective activation is crucial for metal deposition on a substrate, and it can be achieved through lithography, chemical vapor deposition and micro-contact printing. Here, we propose to control the activation point three-dimensionally (3D) through two-photon absorption (TPA) polymerization method, which leads to 3D site-selective deposition. Two types of photopolymer were prepared for deposition control of metal through electroless plating method. One was a commercially available resin, which is typically inactive to metal deposition. Another was a modified resin containing suitable functional groups for metal adhesion. We created a 3D polymer structure consisting of those two components by localizing each resin through TPA method. The fabricated structures were immersed in an electroless plating solution of silver. The partially silver coated sample was observed by a scanning electron microscope after washing and desiccation. Metal microstructure supported with polymer can be realized by 3D site-selective metal deposition. Therefore, it is a useful technique for 3D aligned metallic microstructures without any contacts each other.

Original languageEnglish
Title of host publicationPlasmonics
Subtitle of host publicationNanoimaging, Nanofabrication, and their Applications II
DOIs
Publication statusPublished - Nov 21 2006
EventPlasmonics: Nanoimaging, Nanofabrication, and their Applications II - San Diego, CA, United States
Duration: Aug 16 2006Aug 17 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6324
ISSN (Print)0277-786X

Other

OtherPlasmonics: Nanoimaging, Nanofabrication, and their Applications II
CountryUnited States
CitySan Diego, CA
Period8/16/068/17/06

Keywords

  • 3D structure
  • Metal deposition
  • Micro/nanofabrication
  • Site-selective

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Takeyasu, N., Formanek, F., Chiyoda, K., Tanaka, T., Ishikawa, A., & Kawata, S. (2006). Site-selective metal deposition on 3D micro/nanostructures fabricated by two-photon polymerization. In Plasmonics: Nanoimaging, Nanofabrication, and their Applications II [63240W] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6324). https://doi.org/10.1117/12.681511