Abstract
The hydrothermal method to deposit lead zirconate titanate (PZT) thin film is a new method reported by Tsurumi et al. in 1991. This method consists of two linked processes. We have found that the film deposited by the first process is not PZT but separated lead zirconate (PZ) and lead titanate (PT). In this paper, we report that a PZT thin film was successfully deposited by a single process. The chemical construction and composition of the film were analyzed. The Zr/(Zr+Ti) ratio of the PZT film was controlled by changing the ionic composition of the solution.
| Original language | English |
|---|---|
| Pages (from-to) | 2998-2999 |
| Number of pages | 2 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 36 |
| Issue number | 5 SUPPL. B |
| DOIs | |
| Publication status | Published - May 1997 |
| Externally published | Yes |
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Keywords
- Hydrothermal method
- Piezoelectric material
- Piezoelectric transducer
- PZT thin film
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Engineering(all)
Cite this
Single process to deposit lead zirconate titanate (PZT) thin film by a hydrothermal method. / Morita, Takeshi; Kanda, Takefumi; Yamagata, Yutaka; Kurosawa, Minoru; Higuchi, Toshiro.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 36, No. 5 SUPPL. B, 05.1997, p. 2998-2999.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Single process to deposit lead zirconate titanate (PZT) thin film by a hydrothermal method
AU - Morita, Takeshi
AU - Kanda, Takefumi
AU - Yamagata, Yutaka
AU - Kurosawa, Minoru
AU - Higuchi, Toshiro
PY - 1997/5
Y1 - 1997/5
N2 - The hydrothermal method to deposit lead zirconate titanate (PZT) thin film is a new method reported by Tsurumi et al. in 1991. This method consists of two linked processes. We have found that the film deposited by the first process is not PZT but separated lead zirconate (PZ) and lead titanate (PT). In this paper, we report that a PZT thin film was successfully deposited by a single process. The chemical construction and composition of the film were analyzed. The Zr/(Zr+Ti) ratio of the PZT film was controlled by changing the ionic composition of the solution.
AB - The hydrothermal method to deposit lead zirconate titanate (PZT) thin film is a new method reported by Tsurumi et al. in 1991. This method consists of two linked processes. We have found that the film deposited by the first process is not PZT but separated lead zirconate (PZ) and lead titanate (PT). In this paper, we report that a PZT thin film was successfully deposited by a single process. The chemical construction and composition of the film were analyzed. The Zr/(Zr+Ti) ratio of the PZT film was controlled by changing the ionic composition of the solution.
KW - Hydrothermal method
KW - Piezoelectric material
KW - Piezoelectric transducer
KW - PZT thin film
UR - http://www.scopus.com/inward/record.url?scp=0031144345&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0031144345&partnerID=8YFLogxK
U2 - 10.1143/JJAP.36.2998
DO - 10.1143/JJAP.36.2998
M3 - Article
AN - SCOPUS:0031144345
VL - 36
SP - 2998
EP - 2999
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 5 SUPPL. B
ER -