Single process to deposit lead zirconate titanate (PZT) thin film by a hydrothermal method

Takeshi Morita, Takefumi Kanda, Yutaka Yamagata, Minoru Kurosawa, Toshiro Higuchi

Research output: Contribution to journalArticle

85 Citations (Scopus)

Abstract

The hydrothermal method to deposit lead zirconate titanate (PZT) thin film is a new method reported by Tsurumi et al. in 1991. This method consists of two linked processes. We have found that the film deposited by the first process is not PZT but separated lead zirconate (PZ) and lead titanate (PT). In this paper, we report that a PZT thin film was successfully deposited by a single process. The chemical construction and composition of the film were analyzed. The Zr/(Zr+Ti) ratio of the PZT film was controlled by changing the ionic composition of the solution.

Original languageEnglish
Pages (from-to)2998-2999
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number5 SUPPL. B
Publication statusPublished - May 1 1997
Externally publishedYes

Keywords

  • Hydrothermal method
  • PZT thin film
  • Piezoelectric material
  • Piezoelectric transducer

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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