Single process to deposit lead zirconate titanate (PZT) thin film by a hydrothermal method

Takeshi Morita, Takefumi Kanda, Yutaka Yamagata, Minoru Kurosawa, Toshiro Higuchi

Research output: Contribution to journalArticle

85 Citations (Scopus)

Abstract

The hydrothermal method to deposit lead zirconate titanate (PZT) thin film is a new method reported by Tsurumi et al. in 1991. This method consists of two linked processes. We have found that the film deposited by the first process is not PZT but separated lead zirconate (PZ) and lead titanate (PT). In this paper, we report that a PZT thin film was successfully deposited by a single process. The chemical construction and composition of the film were analyzed. The Zr/(Zr+Ti) ratio of the PZT film was controlled by changing the ionic composition of the solution.

Original languageEnglish
Pages (from-to)2998-2999
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number5 SUPPL. B
DOIs
Publication statusPublished - May 1997
Externally publishedYes

Fingerprint

Lead deposits
deposits
Thin films
thin films
Chemical analysis

Keywords

  • Hydrothermal method
  • Piezoelectric material
  • Piezoelectric transducer
  • PZT thin film

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Engineering(all)

Cite this

Single process to deposit lead zirconate titanate (PZT) thin film by a hydrothermal method. / Morita, Takeshi; Kanda, Takefumi; Yamagata, Yutaka; Kurosawa, Minoru; Higuchi, Toshiro.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 36, No. 5 SUPPL. B, 05.1997, p. 2998-2999.

Research output: Contribution to journalArticle

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