Abstract
We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) includes effects of population kinetics, phase transition from liquid to neutral gas to partially ionized plasma, and so on. We estimate the behaviors of highly energetic ions and neutral particles, and estimate recombination and charge transfer processes between the particles from laser-produced EUV light sources.
| Original language | English |
|---|---|
| Title of host publication | IQEC, International Quantum Electronics Conference Proceedings |
| Pages | 1146-1147 |
| Number of pages | 2 |
| Volume | 2005 |
| DOIs | |
| Publication status | Published - 2005 |
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Keywords
- EUV light sources
- Highly energetic ions
- Laser ablation
- Neutral particles
ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Simulations on laser ablation and its applications to EUV Light Sources. / Furukawa, H.; Kawamura, T.; Nishikawa, Takeshi; Sasaki, A.; Fujima, K.; Nishihara, K.; Yamanaka, C.
IQEC, International Quantum Electronics Conference Proceedings. Vol. 2005 2005. p. 1146-1147 1561040.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Simulations on laser ablation and its applications to EUV Light Sources
AU - Furukawa, H.
AU - Kawamura, T.
AU - Nishikawa, Takeshi
AU - Sasaki, A.
AU - Fujima, K.
AU - Nishihara, K.
AU - Yamanaka, C.
PY - 2005
Y1 - 2005
N2 - We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) includes effects of population kinetics, phase transition from liquid to neutral gas to partially ionized plasma, and so on. We estimate the behaviors of highly energetic ions and neutral particles, and estimate recombination and charge transfer processes between the particles from laser-produced EUV light sources.
AB - We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) includes effects of population kinetics, phase transition from liquid to neutral gas to partially ionized plasma, and so on. We estimate the behaviors of highly energetic ions and neutral particles, and estimate recombination and charge transfer processes between the particles from laser-produced EUV light sources.
KW - EUV light sources
KW - Highly energetic ions
KW - Laser ablation
KW - Neutral particles
UR - http://www.scopus.com/inward/record.url?scp=33846515679&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33846515679&partnerID=8YFLogxK
U2 - 10.1109/IQEC.2005.1561040
DO - 10.1109/IQEC.2005.1561040
M3 - Conference contribution
AN - SCOPUS:33846515679
SN - 078039240X
SN - 9780780392403
VL - 2005
SP - 1146
EP - 1147
BT - IQEC, International Quantum Electronics Conference Proceedings
ER -