Simulations on laser ablation and its applications to EUV Light Sources

H. Furukawa; T. Kawamura; T. Nishikawa; A. Sasaki; K. Fujima; K. Nishihara; C. Yamanaka

doi:10.1109/IQEC.2005.1561040

Simulations on laser ablation and its applications to EUV Light Sources

H. Furukawa, T. Kawamura, T. Nishikawa, A. Sasaki, K. Fujima, K. Nishihara, C. Yamanaka

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) includes effects of population kinetics, phase transition from liquid to neutral gas to partially ionized plasma, and so on. We estimate the behaviors of highly energetic ions and neutral particles, and estimate recombination and charge transfer processes between the particles from laser-produced EUV light sources.

Original language	English
Title of host publication	International Quantum Electronics Conference 2005
Pages	1146-1147
Number of pages	2
DOIs	https://doi.org/10.1109/IQEC.2005.1561040
Publication status	Published - 2005

Publication series

Name	IQEC, International Quantum Electronics Conference Proceedings
Volume	2005

Keywords

EUV light sources
Highly energetic ions
Laser ablation
Neutral particles

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1109/IQEC.2005.1561040

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Furukawa, H., Kawamura, T., Nishikawa, T., Sasaki, A., Fujima, K., Nishihara, K., & Yamanaka, C. (2005). Simulations on laser ablation and its applications to EUV Light Sources. In International Quantum Electronics Conference 2005 (pp. 1146-1147). [1561040] (IQEC, International Quantum Electronics Conference Proceedings; Vol. 2005). https://doi.org/10.1109/IQEC.2005.1561040

Simulations on laser ablation and its applications to EUV Light Sources. / Furukawa, H.; Kawamura, T.; Nishikawa, T.; Sasaki, A.; Fujima, K.; Nishihara, K.; Yamanaka, C.

International Quantum Electronics Conference 2005. 2005. p. 1146-1147 1561040 (IQEC, International Quantum Electronics Conference Proceedings; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Nishihara, K.

AU - Yamanaka, C.

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