Simulations on laser ablation and its applications to EUV Light Sources

H. Furukawa; T. Kawamura; T. Nishikawa; A. Sasaki; K. Fujima; K. Nishihara; C. Yamanaka

doi:10.1109/IQEC.2005.1561040

Simulations on laser ablation and its applications to EUV Light Sources

H. Furukawa, T. Kawamura, T. Nishikawa, A. Sasaki, K. Fujima, K. Nishihara, C. Yamanaka

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) includes effects of population kinetics, phase transition from liquid to neutral gas to partially ionized plasma, and so on. We estimate the behaviors of highly energetic ions and neutral particles, and estimate recombination and charge transfer processes between the particles from laser-produced EUV light sources.

Original language	English
Title of host publication	International Quantum Electronics Conference 2005
Pages	1146-1147
Number of pages	2
DOIs	https://doi.org/10.1109/IQEC.2005.1561040
Publication status	Published - Dec 1 2005

Publication series

Name	IQEC, International Quantum Electronics Conference Proceedings
Volume	2005

Keywords

EUV light sources
Highly energetic ions
Laser ablation
Neutral particles

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1109/IQEC.2005.1561040

Fingerprint Dive into the research topics of 'Simulations on laser ablation and its applications to EUV Light Sources'. Together they form a unique fingerprint.

Cite this

Furukawa, H., Kawamura, T., Nishikawa, T., Sasaki, A., Fujima, K., Nishihara, K., & Yamanaka, C. (2005). Simulations on laser ablation and its applications to EUV Light Sources. In International Quantum Electronics Conference 2005 (pp. 1146-1147). [1561040] (IQEC, International Quantum Electronics Conference Proceedings; Vol. 2005). https://doi.org/10.1109/IQEC.2005.1561040

Simulations on laser ablation and its applications to EUV Light Sources. / Furukawa, H.; Kawamura, T.; Nishikawa, T.; Sasaki, A.; Fujima, K.; Nishihara, K.; Yamanaka, C.

International Quantum Electronics Conference 2005. 2005. p. 1146-1147 1561040 (IQEC, International Quantum Electronics Conference Proceedings; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

@inproceedings{4862755f1e6f4a4188f39b2884acf00e,

title = "Simulations on laser ablation and its applications to EUV Light Sources",

abstract = "We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) includes effects of population kinetics, phase transition from liquid to neutral gas to partially ionized plasma, and so on. We estimate the behaviors of highly energetic ions and neutral particles, and estimate recombination and charge transfer processes between the particles from laser-produced EUV light sources.",

keywords = "EUV light sources, Highly energetic ions, Laser ablation, Neutral particles",

author = "H. Furukawa and T. Kawamura and T. Nishikawa and A. Sasaki and K. Fujima and K. Nishihara and C. Yamanaka",

year = "2005",

month = dec,

day = "1",

doi = "10.1109/IQEC.2005.1561040",

language = "English",

isbn = "078039240X",

series = "IQEC, International Quantum Electronics Conference Proceedings",

pages = "1146--1147",

booktitle = "International Quantum Electronics Conference 2005",

}

TY - GEN

T1 - Simulations on laser ablation and its applications to EUV Light Sources

AU - Furukawa, H.

AU - Kawamura, T.

AU - Nishikawa, T.

AU - Sasaki, A.

AU - Fujima, K.

AU - Nishihara, K.

AU - Yamanaka, C.

PY - 2005/12/1

Y1 - 2005/12/1

N2 - We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) includes effects of population kinetics, phase transition from liquid to neutral gas to partially ionized plasma, and so on. We estimate the behaviors of highly energetic ions and neutral particles, and estimate recombination and charge transfer processes between the particles from laser-produced EUV light sources.

AB - We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) includes effects of population kinetics, phase transition from liquid to neutral gas to partially ionized plasma, and so on. We estimate the behaviors of highly energetic ions and neutral particles, and estimate recombination and charge transfer processes between the particles from laser-produced EUV light sources.

KW - EUV light sources

KW - Highly energetic ions

KW - Laser ablation

KW - Neutral particles

UR - http://www.scopus.com/inward/record.url?scp=33846515679&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33846515679&partnerID=8YFLogxK

U2 - 10.1109/IQEC.2005.1561040

DO - 10.1109/IQEC.2005.1561040

M3 - Conference contribution

AN - SCOPUS:33846515679

SN - 078039240X

SN - 9780780392403

T3 - IQEC, International Quantum Electronics Conference Proceedings

SP - 1146

EP - 1147

BT - International Quantum Electronics Conference 2005

ER -