Simulations on laser ablation and its applications to EUV Light Sources

H. Furukawa, T. Kawamura, T. Nishikawa, A. Sasaki, K. Fujima, K. Nishihara, C. Yamanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) includes effects of population kinetics, phase transition from liquid to neutral gas to partially ionized plasma, and so on. We estimate the behaviors of highly energetic ions and neutral particles, and estimate recombination and charge transfer processes between the particles from laser-produced EUV light sources.

Original languageEnglish
Title of host publicationInternational Quantum Electronics Conference 2005
Pages1146-1147
Number of pages2
DOIs
Publication statusPublished - Dec 1 2005

Publication series

NameIQEC, International Quantum Electronics Conference Proceedings
Volume2005

Keywords

  • EUV light sources
  • Highly energetic ions
  • Laser ablation
  • Neutral particles

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Furukawa, H., Kawamura, T., Nishikawa, T., Sasaki, A., Fujima, K., Nishihara, K., & Yamanaka, C. (2005). Simulations on laser ablation and its applications to EUV Light Sources. In International Quantum Electronics Conference 2005 (pp. 1146-1147). [1561040] (IQEC, International Quantum Electronics Conference Proceedings; Vol. 2005). https://doi.org/10.1109/IQEC.2005.1561040