Simulations on laser ablation and its applications to EUV Light Sources

H. Furukawa, T. Kawamura, Takeshi Nishikawa, A. Sasaki, K. Fujima, K. Nishihara, C. Yamanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) includes effects of population kinetics, phase transition from liquid to neutral gas to partially ionized plasma, and so on. We estimate the behaviors of highly energetic ions and neutral particles, and estimate recombination and charge transfer processes between the particles from laser-produced EUV light sources.

Original languageEnglish
Title of host publicationIQEC, International Quantum Electronics Conference Proceedings
Pages1146-1147
Number of pages2
Volume2005
DOIs
Publication statusPublished - 2005

Fingerprint

laser ablation
light sources
neutral particles
neutral gases
estimates
simulation
charge transfer
fluids
kinetics
radiation
liquids
lasers
ions

Keywords

  • EUV light sources
  • Highly energetic ions
  • Laser ablation
  • Neutral particles

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Furukawa, H., Kawamura, T., Nishikawa, T., Sasaki, A., Fujima, K., Nishihara, K., & Yamanaka, C. (2005). Simulations on laser ablation and its applications to EUV Light Sources. In IQEC, International Quantum Electronics Conference Proceedings (Vol. 2005, pp. 1146-1147). [1561040] https://doi.org/10.1109/IQEC.2005.1561040

Simulations on laser ablation and its applications to EUV Light Sources. / Furukawa, H.; Kawamura, T.; Nishikawa, Takeshi; Sasaki, A.; Fujima, K.; Nishihara, K.; Yamanaka, C.

IQEC, International Quantum Electronics Conference Proceedings. Vol. 2005 2005. p. 1146-1147 1561040.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Furukawa, H, Kawamura, T, Nishikawa, T, Sasaki, A, Fujima, K, Nishihara, K & Yamanaka, C 2005, Simulations on laser ablation and its applications to EUV Light Sources. in IQEC, International Quantum Electronics Conference Proceedings. vol. 2005, 1561040, pp. 1146-1147. https://doi.org/10.1109/IQEC.2005.1561040
Furukawa H, Kawamura T, Nishikawa T, Sasaki A, Fujima K, Nishihara K et al. Simulations on laser ablation and its applications to EUV Light Sources. In IQEC, International Quantum Electronics Conference Proceedings. Vol. 2005. 2005. p. 1146-1147. 1561040 https://doi.org/10.1109/IQEC.2005.1561040
Furukawa, H. ; Kawamura, T. ; Nishikawa, Takeshi ; Sasaki, A. ; Fujima, K. ; Nishihara, K. ; Yamanaka, C. / Simulations on laser ablation and its applications to EUV Light Sources. IQEC, International Quantum Electronics Conference Proceedings. Vol. 2005 2005. pp. 1146-1147
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