Simulations on laser ablation and its applications

Hiroyuki Furukawa, Tohru Kawamura, Atsushi Sunahara, Takeshi Nishikawa, Katsunobu Nishihara, Chiyoe Yamanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Integrated laser ablation simulation code includes phase transition from liquid to neutral gas to partially ionized plasma, detail laser absorption processes, equation of state, hydrodynamics, and radiation transport, is developed to describe ablation phenomena with phase transition and properties of emission plasmas. For an application of this simulation code, we perform simulations on optimization of laser produced plasmas for extreme ultra violet (EUV) light sources. Because of very low laser intensities (from 10 10 W/cm2 to 1011 W/cm2 ) compared with that in laser fusion cases, it is necessary to include phase transition effects into ablation radiation hydrodynamics code.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsC.R. Phipps
Pages872-884
Number of pages13
Volume5448
EditionPART 2
DOIs
Publication statusPublished - 2004
EventHigh-Power Laser Ablation V - Taos, NM, United States
Duration: Apr 25 2004Apr 30 2004

Other

OtherHigh-Power Laser Ablation V
CountryUnited States
CityTaos, NM
Period4/25/044/30/04

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Keywords

  • Detail laser absorption
  • EUV
  • Neutral gas
  • Phase transition
  • Radiation transport
  • Simulation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Furukawa, H., Kawamura, T., Sunahara, A., Nishikawa, T., Nishihara, K., & Yamanaka, C. (2004). Simulations on laser ablation and its applications. In C. R. Phipps (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (PART 2 ed., Vol. 5448, pp. 872-884). [111] https://doi.org/10.1117/12.549105