Simulations on laser ablation and its applications

Hiroyuki Furukawa, Tohru Kawamura, Atsushi Sunahara, Takeshi Nishikawa, Katsunobu Nishihara, Chiyoe Yamanaka

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

Integrated laser ablation simulation code includes phase transition from liquid to neutral gas to partially ionized plasma, detail laser absorption processes, equation of state, hydrodynamics, and radiation transport, is developed to describe ablation phenomena with phase transition and properties of emission plasmas. For an application of this simulation code, we perform simulations on optimization of laser produced plasmas for extreme ultra violet (EUV) light sources. Because of very low laser intensities (from 10 10 W/cm2 to 1011 W/cm2 ) compared with that in laser fusion cases, it is necessary to include phase transition effects into ablation radiation hydrodynamics code.

Original languageEnglish
Article number111
Pages (from-to)872-884
Number of pages13
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5448
Issue numberPART 2
DOIs
Publication statusPublished - Dec 1 2004
EventHigh-Power Laser Ablation V - Taos, NM, United States
Duration: Apr 25 2004Apr 30 2004

Keywords

  • Detail laser absorption
  • EUV
  • Neutral gas
  • Phase transition
  • Radiation transport
  • Simulation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Furukawa, H., Kawamura, T., Sunahara, A., Nishikawa, T., Nishihara, K., & Yamanaka, C. (2004). Simulations on laser ablation and its applications. Proceedings of SPIE - The International Society for Optical Engineering, 5448(PART 2), 872-884. [111]. https://doi.org/10.1117/12.549105