Abstract
Integrated laser ablation simulation code includes phase transition from liquid to neutral gas to partially ionized plasma, detail laser absorption processes, equation of state, hydrodynamics, and radiation transport, is developed to describe ablation phenomena with phase transition and properties of emission plasmas. For an application of this simulation code, we perform simulations on optimization of laser produced plasmas for extreme ultra violet (EUV) light sources. Because of very low laser intensities (from 10 10 W/cm2 to 1011 W/cm2 ) compared with that in laser fusion cases, it is necessary to include phase transition effects into ablation radiation hydrodynamics code.
Original language | English |
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Article number | 111 |
Pages (from-to) | 872-884 |
Number of pages | 13 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 5448 |
Issue number | PART 2 |
DOIs | |
Publication status | Published - Dec 1 2004 |
Event | High-Power Laser Ablation V - Taos, NM, United States Duration: Apr 25 2004 → Apr 30 2004 |
Keywords
- Detail laser absorption
- EUV
- Neutral gas
- Phase transition
- Radiation transport
- Simulation
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering