Simulations on laser ablation and its applications

Hiroyuki Furukawa; Tohru Kawamura; Atsushi Sunahara; Takeshi Nishikawa; Katsunobu Nishihara; Chiyoe Yamanaka

doi:10.1117/12.549105

Simulations on laser ablation and its applications

Hiroyuki Furukawa, Tohru Kawamura, Atsushi Sunahara, Takeshi Nishikawa, Katsunobu Nishihara, Chiyoe Yamanaka

Research output: Contribution to journal › Conference article › peer-review

5 Citations (Scopus)

Abstract

Integrated laser ablation simulation code includes phase transition from liquid to neutral gas to partially ionized plasma, detail laser absorption processes, equation of state, hydrodynamics, and radiation transport, is developed to describe ablation phenomena with phase transition and properties of emission plasmas. For an application of this simulation code, we perform simulations on optimization of laser produced plasmas for extreme ultra violet (EUV) light sources. Because of very low laser intensities (from 10 ¹⁰ W/cm² to 10¹¹ W/cm² ) compared with that in laser fusion cases, it is necessary to include phase transition effects into ablation radiation hydrodynamics code.

Original language	English
Article number	111
Pages (from-to)	872-884
Number of pages	13
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5448
Issue number	PART 2
DOIs	https://doi.org/10.1117/12.549105
Publication status	Published - Dec 1 2004
Event	High-Power Laser Ablation V - Taos, NM, United States Duration: Apr 25 2004 → Apr 30 2004

Keywords

Detail laser absorption
EUV
Neutral gas
Phase transition
Radiation transport
Simulation

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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Simulations on laser ablation and its applications. / Furukawa, Hiroyuki; Kawamura, Tohru; Sunahara, Atsushi; Nishikawa, Takeshi; Nishihara, Katsunobu; Yamanaka, Chiyoe.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5448, No. PART 2, 111, 01.12.2004, p. 872-884.

Research output: Contribution to journal › Conference article › peer-review

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