Abstract
Recent developments in SIMS with both Ar cluster ions and swift heavy ions are presented. With these primary beams, the analysis of organic semiconductors and animal cells shows that one of the key factors to realizing the SIMS analysis of organic materials is high-energy deposition near the surface. Molecular depth profiling and images of organic materials were demonstrated by using SIMS.
| Original language | English |
|---|---|
| Pages (from-to) | 1612-1615 |
| Number of pages | 4 |
| Journal | Surface and Interface Analysis |
| Volume | 42 |
| Issue number | 10-11 |
| DOIs | |
| Publication status | Published - Oct 1 2010 |
Keywords
- Cluster ion beam
- Molecular depth profiling
- SIMS
- Swift heavy ion beam
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
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Matsuo, J., Ninomiya, S., Yamada, H., Ichiki, K., Wakamatsu, Y., Hada, M., Seki, T., & Aoki, T. (2010). SIMS with highly excited primary beams for molecular depth profiling and imaging of organic and biological materials. Surface and Interface Analysis, 42(10-11), 1612-1615. https://doi.org/10.1002/sia.3585