SiC film formation and growth by the thermal reaction of a film adsorbed on a Si(111)-(7) surface: Bonding nature of molecules and SiC-film surface phonons

Kazuyuki Sakamoto, Toshinao Suzuki, Masashi Harada, Takanori Wakita, Shozo Suto, Atsuo Kasuya

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31 Citations (Scopus)

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Chemical Compounds

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