Si single-electron CCD

A. Fujiwara, K. Yamazaki, Y. Takahashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution


A charge-coupled device (CCD) that can manipulate single electrons (holes) was fabricated and found to operate successfully. We demonstrated that the fabricated device can transfer a single hole and also detect its position by a novel charge sensing method based on the electron-hole system in a Si quantum wire. This was the first demonstration of manipulating an elementary charge in Si.

Original languageEnglish
Title of host publication2001 International Microprocesses and Nanotechnology Conference, MNC 2001
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages2
ISBN (Print)4891140178, 9784891140175
Publication statusPublished - 2001
Externally publishedYes
EventInternational Microprocesses and Nanotechnology Conference, MNC 2001 - Shimane, Japan
Duration: Oct 31 2001Nov 2 2001


OtherInternational Microprocesses and Nanotechnology Conference, MNC 2001

ASJC Scopus subject areas

  • Biotechnology
  • Fluid Flow and Transfer Processes
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation


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