Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

Takefumi Kanda, Minoru K. Kurosawa, Toshiro Higuchi

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 × 10-1 mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.

Original languageEnglish
Pages (from-to)61-65
Number of pages5
JournalUltrasonics
Volume40
Issue number1-8
DOIs
Publication statusPublished - May 2002
Externally publishedYes

Fingerprint

Vibrators
touch
Thin films
probes
sensitivity
sensors
Sensors
thin films
miniaturization
Transducers
transducers
vibration

Keywords

  • Hydrothermal method
  • PZT thin film
  • Surface profile measurement
  • Touch probe sensor

ASJC Scopus subject areas

  • Safety, Risk, Reliability and Quality
  • Acoustics and Ultrasonics

Cite this

Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator. / Kanda, Takefumi; Kurosawa, Minoru K.; Higuchi, Toshiro.

In: Ultrasonics, Vol. 40, No. 1-8, 05.2002, p. 61-65.

Research output: Contribution to journalArticle

Kanda, Takefumi ; Kurosawa, Minoru K. ; Higuchi, Toshiro. / Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator. In: Ultrasonics. 2002 ; Vol. 40, No. 1-8. pp. 61-65.
@article{d1d60aaf4b4f43cc9b0b8a11018d204c,
title = "Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator",
abstract = "In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 × 10-1 mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.",
keywords = "Hydrothermal method, PZT thin film, Surface profile measurement, Touch probe sensor",
author = "Takefumi Kanda and Kurosawa, {Minoru K.} and Toshiro Higuchi",
year = "2002",
month = "5",
doi = "10.1016/S0041-624X(02)00091-4",
language = "English",
volume = "40",
pages = "61--65",
journal = "Ultrasonics",
issn = "0041-624X",
publisher = "Elsevier",
number = "1-8",

}

TY - JOUR

T1 - Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

AU - Kanda, Takefumi

AU - Kurosawa, Minoru K.

AU - Higuchi, Toshiro

PY - 2002/5

Y1 - 2002/5

N2 - In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 × 10-1 mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.

AB - In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 × 10-1 mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.

KW - Hydrothermal method

KW - PZT thin film

KW - Surface profile measurement

KW - Touch probe sensor

UR - http://www.scopus.com/inward/record.url?scp=0036566603&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036566603&partnerID=8YFLogxK

U2 - 10.1016/S0041-624X(02)00091-4

DO - 10.1016/S0041-624X(02)00091-4

M3 - Article

C2 - 12160010

AN - SCOPUS:0036566603

VL - 40

SP - 61

EP - 65

JO - Ultrasonics

JF - Ultrasonics

SN - 0041-624X

IS - 1-8

ER -