Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

Takefumi Kanda, Minoru K. Kurosawa, Toshiro Higuchi

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 × 10-1 mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.

Original languageEnglish
Pages (from-to)61-65
Number of pages5
JournalUltrasonics
Volume40
Issue number1-8
DOIs
Publication statusPublished - May 1 2002
Externally publishedYes

Keywords

  • Hydrothermal method
  • PZT thin film
  • Surface profile measurement
  • Touch probe sensor

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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