Rod-shaped vibro touch sensor using PZT thin film

Takefumi Kanda, Takeshi Morita, Minoru Kurosawa, Toshiro Higuchi

Research output: Contribution to conferencePaper

4 Citations (Scopus)

Abstract

We have fabricated a probe sensor. This sensor is for high-precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin film was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made 27.8 mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.

Original languageEnglish
Pages378-383
Number of pages6
Publication statusPublished - Jan 1 1998
Externally publishedYes
EventProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems - Heidelberg, Ger
Duration: Jan 25 1998Jan 29 1998

Other

OtherProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems
CityHeidelberg, Ger
Period1/25/981/29/98

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Kanda, T., Morita, T., Kurosawa, M., & Higuchi, T. (1998). Rod-shaped vibro touch sensor using PZT thin film. 378-383. Paper presented at Proceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems, Heidelberg, Ger, .