Rod-shaped vibro touch sensor using PZT thin film

Takefumi Kanda, Takeshi Morita, Minoru Kurosawa, Toshiro Higuchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We have fabricated a probe sensor. This sensor is for high-precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin film was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made 27.8 mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.

Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Editors Anon
PublisherIEEE
Pages378-383
Number of pages6
Publication statusPublished - 1998
Externally publishedYes
EventProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems - Heidelberg, Ger
Duration: Jan 25 1998Jan 29 1998

Other

OtherProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems
CityHeidelberg, Ger
Period1/25/981/29/98

Fingerprint

Thin films
Sensors
Coordinate measuring machines
Microscopes
Surface roughness
Scanning
Experiments

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Kanda, T., Morita, T., Kurosawa, M., & Higuchi, T. (1998). Rod-shaped vibro touch sensor using PZT thin film. In Anon (Ed.), Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 378-383). IEEE.

Rod-shaped vibro touch sensor using PZT thin film. / Kanda, Takefumi; Morita, Takeshi; Kurosawa, Minoru; Higuchi, Toshiro.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). ed. / Anon. IEEE, 1998. p. 378-383.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kanda, T, Morita, T, Kurosawa, M & Higuchi, T 1998, Rod-shaped vibro touch sensor using PZT thin film. in Anon (ed.), Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, pp. 378-383, Proceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems, Heidelberg, Ger, 1/25/98.
Kanda T, Morita T, Kurosawa M, Higuchi T. Rod-shaped vibro touch sensor using PZT thin film. In Anon, editor, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE. 1998. p. 378-383
Kanda, Takefumi ; Morita, Takeshi ; Kurosawa, Minoru ; Higuchi, Toshiro. / Rod-shaped vibro touch sensor using PZT thin film. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). editor / Anon. IEEE, 1998. pp. 378-383
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