High friction forces on carbon nanotube (CNT) film have been decreased by applying an oscillating motion under micronewton and millinewton loads. The high friction force of CNT films became very low levels at the oscillating frequency of more than 500 Hz under both load ranges. The friction properties of silicon wafer and polyimide surfaces by applying oscillating motions were also measured for comparison and the friction decreases were also observed. The frequency dependences of the decrease of the friction force were investigated under micronewton and millinewton loads. The relationship between friction forces and loads under micronewton load was also measured.