Realization of Vibration Absorption at Multiple Frequencies on Vacuum Chamber with Cryopump

Takeshi Mizuno, Takahito Iida, Yuji Ishino, Masaya Takasaki, Daisuke Yamaguchi, Masayuki Hara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A vibration isolation device with an active dynamic vibration absorber is developed to remove vibration induced by a cryopump. Cryopump is used to make high-vacuum and low-temperature environments for precise measurement. However, it induces vibrations with multiple frequencies, which may deteriorate measurement accuracy. This study focuses on removing low-frequency vibration because conventional vibration isolation devices for cryopump can hardly remove such vibration. In the developed vibration isolation device, an active vibration absorber is used to remove the vibration efficiently at low frequencies. In this report, the design concept and structure of the fabricated apparatus are described.

Original languageEnglish
Title of host publication2019 12th Asian Control Conference, ASCC 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages699-703
Number of pages5
ISBN (Electronic)9784888983006
Publication statusPublished - Jun 2019
Externally publishedYes
Event12th Asian Control Conference, ASCC 2019 - Kitakyushu-shi, Japan
Duration: Jun 9 2019Jun 12 2019

Publication series

Name2019 12th Asian Control Conference, ASCC 2019

Conference

Conference12th Asian Control Conference, ASCC 2019
CountryJapan
CityKitakyushu-shi
Period6/9/196/12/19

ASJC Scopus subject areas

  • Computer Science Applications
  • Control and Optimization
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Realization of Vibration Absorption at Multiple Frequencies on Vacuum Chamber with Cryopump'. Together they form a unique fingerprint.

Cite this