TY - JOUR
T1 - Real-time observation on hot-filament-assisted CVD growth of graphene
AU - Taira, Takanobu
AU - Shinohara, Takuya
AU - Obata, Seiji
AU - Saiki, Koichiro
N1 - Funding Information:
This work was supported by JSPS KAKENHI Grant Numbers JP25107002, JP15K13346.
Publisher Copyright:
© 2019 The Japan Society of Applied Physics.
PY - 2019
Y1 - 2019
N2 - The effect of hot-filament on CVD growth of graphene was investigated using radiation-mode optical microscopy (Rad-OM), which we developed for the real-time observation of the CVD process of graphene. We found that the hot-filament induced nucleation and accelerated growth of graphene, the effects of which were enhanced by raising the filament temperature. At a certain filament temperature, growth was accelerated while no additive nucleation occurred. The present results suggest that decomposing source gas by hot-filament at optimized filament temperatures can accelerate growth while suppressing additive nucleation, which would be useful for synthesizing large-area single-crystalline graphene in a short time.
AB - The effect of hot-filament on CVD growth of graphene was investigated using radiation-mode optical microscopy (Rad-OM), which we developed for the real-time observation of the CVD process of graphene. We found that the hot-filament induced nucleation and accelerated growth of graphene, the effects of which were enhanced by raising the filament temperature. At a certain filament temperature, growth was accelerated while no additive nucleation occurred. The present results suggest that decomposing source gas by hot-filament at optimized filament temperatures can accelerate growth while suppressing additive nucleation, which would be useful for synthesizing large-area single-crystalline graphene in a short time.
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U2 - 10.7567/1347-4065/ab106f
DO - 10.7567/1347-4065/ab106f
M3 - Article
AN - SCOPUS:85072843130
SN - 0021-4922
VL - 58
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - SI
M1 - SIIB24
ER -