Real-time observation on hot-filament-assisted CVD growth of graphene

Takanobu Taira, Takuya Shinohara, Seiji Obata, Koichiro Saiki

Research output: Contribution to journalArticle

Abstract

The effect of hot-filament on CVD growth of graphene was investigated using radiation-mode optical microscopy (Rad-OM), which we developed for the real-time observation of the CVD process of graphene. We found that the hot-filament induced nucleation and accelerated growth of graphene, the effects of which were enhanced by raising the filament temperature. At a certain filament temperature, growth was accelerated while no additive nucleation occurred. The present results suggest that decomposing source gas by hot-filament at optimized filament temperatures can accelerate growth while suppressing additive nucleation, which would be useful for synthesizing large-area single-crystalline graphene in a short time.

Original languageEnglish
Article numberSIIB24
JournalJapanese Journal of Applied Physics
Volume58
Issue numberSI
DOIs
Publication statusPublished - Jan 1 2019
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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