Rapid preparation of solution-processed InGaZnO thin films by microwave annealing and photoirradiation

Heajeong Cheong, Shintaro Ogura, Hirobumi Ushijima, Manabu Yoshida, Nobuko Fukuda, Sei Uemura

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Abstract

We fabricated solution-processed indium-gallium-zinc oxide (IGZO) thin-film transistors (TFTs) by microwave (MW) annealing an IGZO precursor film followed by irradiating with vacuum ultraviolet (VUV) light. MW annealing allows more rapid heating of the precursor film than conventional annealing processes using a hot plate or electric oven and promotes the crystallization of IGZO. VUV irradiation was used to reduce the duration and temperature of the post-annealing step. Consequently, the IGZO TFTs fabricated through MW annealing for 5 min and VUV irradiation for 1 min exhibited an on/off current ratio of 108 and a field-effect mobility of 0.3 cm2 V-1s-1. These results indicate that MW annealing and photoirradiation is an effective combination for annealing solution processed IGZO precursor films to prepare the semiconductor layers of TFTs.

Original languageEnglish
Article number067127
JournalAIP Advances
Volume5
Issue number6
DOIs
Publication statusPublished - Jun 1 2015
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint

Dive into the research topics of 'Rapid preparation of solution-processed InGaZnO thin films by microwave annealing and photoirradiation'. Together they form a unique fingerprint.

Cite this