Progress in understanding of laser-produced plasmas for EUV source

N. Miyanaga, K. Fujima, S. Fujioka, Y. Fujimoto, H. Fujita, H. Furukawa, K. Hashimoto, T. Hibino, T. Kagawa, T. Kato, T. Kawamura, F. Koike, R. Matsui, R. More, M. Murakami, K. Nagai, M. Nakai, M. Nakatsuka, T. Nishikawa, K. NishiharaH. Nishimura, T. Norimatsu, T. Okuno, A. Sasaki, K. Shigemori, Y. Shimada, F. L. Sohnatzadeh, A. Sunahara, H. Tanuma, Y. Tao, K. Tsubakimoto, S. Uchida, M. Yamaura, H. Yoshida, V. Zhakhovskii, Y. Izawa

Research output: Contribution to journalConference article

Original languageEnglish
Pages (from-to)297-298
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume1
Publication statusPublished - Jan 1 2003
Event2003 IEEE LEOS Annual Meeting Conference Proceedings - TUCSON, AZ, United States
Duration: Oct 26 2003Oct 30 2003

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Miyanaga, N., Fujima, K., Fujioka, S., Fujimoto, Y., Fujita, H., Furukawa, H., Hashimoto, K., Hibino, T., Kagawa, T., Kato, T., Kawamura, T., Koike, F., Matsui, R., More, R., Murakami, M., Nagai, K., Nakai, M., Nakatsuka, M., Nishikawa, T., ... Izawa, Y. (2003). Progress in understanding of laser-produced plasmas for EUV source. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 1, 297-298.